PD IEC PAS 61340-5-6-2022原版完整文件.docx

BSI Standards PublicationPD IEC PAS 61340-5-6:2022ElectrostaticsPart 5-6 : Protection of electronic devices from electrostatic phenomena Process assessment techniquesPD IEC PAS 6134056:2022National forewordThis Published Document is the UK implementation of IEC PAS 6134056:2022.The UK participation in its preparation was entrusted to Technical Committee GEL/101, Electrostatics.A list of organizations represented on this committee can be obtained on request to its committee manager.Contractual and legal considerationsThis publication has been prepared in good faith, however no representation, warranty, assurance or undertaking (express or implied) is or will be made, and no responsibility or liability is or will be accepted by BSI in relation to the adequacy, accuracy, completeness or reasonableness of this publication. All and any such responsibility and liability is expressly disclaimed to the full extent permitted by the law.This publication is provided as is, and is to be used at the recipients own risk.The recipient is advised to consider seeking professional guidance with respect to its use of this publication.This publication is not intended to constitute a contract. Users are responsible for its correct application.This publication is not to be regarded as a British Standard.© The British Standards Institution 2022 Published by BSI Standards Limited 2022ISBN 978 0 539 21855 8ICS 17.220.99; 29.020Compliance with a Published Document cannot confer immunity from legal obligations.This Published Document was published under the authority of the Standards Policy and Strategy Committee on 30 September 2022.Amendments/corrigenda issued since publicationDateText affectedIEC PAS 61340-5-6® Edition 1.02022-06PUBLICLY AVAILABLE SPECIFICATIONcolour insideElectrostatics Part 5-6: Protection of electronic devices from electrostatic phenomena Process assessment techniquesINTERNATIONAL ELECTROTECHNICAL COMMISSIONICS 17.220.99; 29.020ISBN 978-2-8322-3943-8Warning! Make sure that you obtained this publication from an authorized distributor.® Registered trademark of the International Electrotechnical CommissionPD IEC PAS 6134056:2022 2 IEC PAS 61340-5-6:2022 © IEC 2022CONTENTSFOREWORD41.0 PURPOSE, SCOPE, LIMITATION, and EXPERIENCE LEVEL REQUIRED91.1 Purpose91.2 Scope91.3 Limitation91.4 Experience Level Required92.0 ReferenceD PUBLICATIONS93.0 DEFINITIONS104.0 Personnel Safety105.0 Measurement Techniques FOR ESd Risk Assessment106.0 ESD Robustness of ESDS ITEMS used in Processes126.1 ESD Withstand Currents of Single Devices (Components)136.1.1 Human Body Model136.1.2 Discharge of Charged Conductors136.1.3 Charged Device Model146.2 ESD Withstand Currents of Electronic Assemblies146.2.1 Discharge of Charged Personnel146.2.2 Discharge of Charged Conductors146.2.3 Discharge of Boards/Systems157.0 Process Assessment Flow157.1 General Considerations157.2 Manual Handling Steps167.2.1 Introduction167.2.2 Parameter Limits for ESD Process Assessment in Manual Handling Steps167.2.3 Detailed ESD Risk Assessment Flow177.3 Conductors187.3.1 Introduction187.3.2 Parameter Limits for Process Assessment of Conductors197.3.3 Detailed ESD Risk Assessment Flow197.4 Charged ESDS Items207.4.1 Introduction207.4.2 Parameter Limits for Process Assessment of Charged ESDS Items207.4.3 Detailed ESD Risk Assessment Flow217.5 Risks Due to Process-Required Insulators237.5.1 Introduction237.5.2 Parameter Limits for Process Assessment of Process-Required Insulators237.5.3 Detailed ESD Risk Assessment Flow247.6 Process Assessment by ESD Event Detection257.6.1 Introduction25IEC PAS 61340-5-6:2022 © IEC 2022 3 7.6.2 General Procedure267.6.3 Detailed ESD Risk Assessment Flow26ANNEX A (INFORMATIVE): Measurement TECHNIQUES And EQuipment28A.1 General Considerations28A.2 Measurements of Grounding28A.3 Measurements of Electrostatic Fields31A.4 Measurements of Charges32A.5 Measurements of Electrostatic Voltages33A.6 Measurements of Discharge Events37A.7 Measurements of Discharge Currents39ANNEX B (INFORMATIVE) PREPARATION: WHAT IS NECESSARY TO . PREPARE AN EFFECTIVE PROCESS EVALUATION?45B.1 Measurement of Temperature, Humidity, and Basic Electrostatic Conditions45B.2 Further Hints for Preparation45ANNEX C (INFORMATIVE) Risk Assessment and Mitigation46ANNEX D (INFORMATIVE) ExampleS for defining limits in process assessment for . Risks Due to Charged Personnel47ANNEX E (INFORMATIVE) Example for CDM risk assessment in a . semiconductor manufacturing line49ANNEX F (INFORMATIVE) Bibliography53ANNEX g (INFORMATIVE) revision History for ANSI/ESD Sp17.154Table 1 Overview of Possible Measurement Equipment Used for Different Scenarios . to Assess ESD Risk11Table 2 Peak Current Ranges of CDM Discharges of Small and Large Verification Modules for Oscilloscopes with a Bandwidth of 1 GHz and 6 GHz According to ANSI/ESDA/JEDEC JS-00244Table 3 Recommended Measurement Locations During Process Assessment in Assembly . (Pre-Assembly) of Devices49Table 4 Recommended Measurement Locations During Process Assessment in Device Testing . 50Figure 1 Direct (Best Correlation) and Indirect (Least Correlation) Measurements . to Assess an ESD Risk12Figure 2 Flow to Assess ESD Risk Induced by Personnel18Figure 3 Flow to Assess the ESD Risk Induced by Conductors20Figure 4 Flow to Assess the ESD Risk Induced by Charged ESDS Items22Figure 5 Flow to Assess the ESD Risk Induced by Process-Required Insulators25Figure 6 Flow to Assess the ESD Risk by Detecting the Electromagnetic Radiation . Using ESD Event Detectors or Antennas and Oscilloscopes27Figure 7 Examples of Current Probes40Figure 8 Example of a 4-GHz Pellegrini Target42Figure 9 Commercially Available CDM Test Head Used for Discharge Current Measurements43Figure 10 Discharge Current Measured in the Field and During Device Qualification 847Figure 11 Examples of Measurements During Semiconductor Assembly and Testing50Figure 12 Schematic of Possible CDM-Like Scenarios During Device Testing52 4 IEC PAS 61340-5-6:2022 © IEC 2022INTERNATIONAL ELECTROTECHNICAL COMMISSIONELECTROSTATICS Part 5-6: Protection of electronic devices from electrostatic phenomena Process assessment techniquesFOREWORD1) The International Electrotechnical Commission (IEC) is a worldwide organization for standardization comprising all national electrotechnical committees (IEC National Committees). The object of IEC is to promote international co-operation on all questions concerning standardization in the electrical and electronic fields. To this end and in addition to other activities, IEC publishes International Standards, Technical Specifications, Technical Reports, Publicly Available Specifications (PAS) and Guides (hereafter referred to as “IEC Publication(s)”). Their preparation is entrusted to technical committees; any IEC National Committee interested in the subject dealt with may participate in this preparatory work. International, governmental and non-governmental organizations liaising with the IEC also participate in this preparation. IEC collaborates closely with the International Organization for Standardization (ISO) in accordance with conditions determined by agreement between the two organizations.2) The formal decisions or agreements of IEC on technical matters express, as nearly as possible, an international consensus of opinion on the relevant subjects since each technical committee has representation from all interested IEC National Committees.3) IEC Publications have the form of recommendations for international use and are accepted by IEC National Committees in that sense. While all reasonable efforts are made to ensure that the technical content of IEC Publications is accurate, IEC cannot be held responsible for the way in which they are used or for any misinterpretation by any end user.4) In order to promote international uniformity, IEC National Committees undertake to apply IEC Publications transparently to the maximum extent possible in their national and regional publications. Any divergence between any IEC Publication and the corresponding national or regional publication shall be clearly indicated in the latter.5) IEC itself does not provide any attestation of conformity. Independent certification bodies provide conformity assessment services and, in some areas, access to IEC marks of conformity. IEC is not responsible for any services carried out by independent certification bodies.6) All users should ensure that they have the latest edition of this publication.7) No liability shall attach to IEC or its directors, employees, servants or agents including individual experts and members of its technical committees and IEC National Committees for any personal injury, property damage or other damage of any nature whatsoever, whether direct or indirect, or for costs (including legal fees) and expenses arising out of the publication, use of, or reliance upon, this IEC Publication or any other IEC Publications.8) Attention is drawn to the Normative references cited in this publication. Use of the referenced publications is indispensable for the correct application of this publication.9) Attention is drawn to the possibility that some of the elements of this IEC Publication may be the subject of patent rights. IEC shall not be held responsible for identifying any or all such patent rights.A PAS is an intermediate specification made available to the public and needing a lower level of consensus than an International Standard to be approved by vote (simple majority).IEC PAS 61340-5-6 has been processed by IEC technical committee 101: Electrostatics.It is based on ANSI/ESD SP17.1-2020. The structure and editorial rules used in this publication reflect the practice of the organization which submitted it.The text of this PAS is based on the following document:This PAS was approved forpublication by the P-members of the committee concerned as indicated in the following documentDraft PASReport on voting101/654/DPAS101/663/RVDPASIEC PAS 61340-5-6:2022 © IEC 2022 5 Following publication of this PAS, the technical committee or subcommittee concerned may transform it into an International Standard.A list of all parts in the IEC 61340 series, published under the general title Electrostatics, can be found on the IEC website.This PAS shall remain valid for an initial maximum period of 2 years starting from the publication date. The validity may be extended for a single period up to a maximum of 2 years, at the end of which it shall be published as another type of normative document, or shall be withdrawn.IMPORTANT The "colour inside" logo on the cover page of this document indicates that it contains colours which are considered to be useful for the correct understanding of its contents. Users should therefore print this document using a colour printer. 6 IEC PAS 61340-5-6:2022 © IEC 2022ESD Association Standard Practice for the Protection of Electrostatic DischargeSusceptible Items Process Assessment TechniquesApproved November 17, 2020 EOS/ESD Association, Inc.IEC PAS 61340-5-6:2022 © IEC 2022 7 (This foreword is not part of EOS/ESD Association, Inc. Standard Practice ANSI/ESD SP17.1-2020)FOREWORDThis standard practice1 describes a set of methodologies, techniques, and tools that can be used to characterize a process where ESD sensitive (ESDS) items are handled. This document's procedures are meant to be used by those possessing knowledge and experience with electrostatic measurements.This document provides methods to determine the level of ESD risk that remains in the process after ESD protective equipment and materials are implemented.These test methods' objective is to identify if potentially damaging ESD events are occurring or if significant electrostatic charges are generated on people, equipment, materials, components, or printed circuit board assemblies (PCBA) even though there are static control measures in place.Sensitivities of items are characterized by industry-standard ESD testing and rated by their withstand voltages. This document is intended to provide methods to determine whether items of a given withstand voltage are at risk in the process.The wide variety of ESD protective equipment and materials and the environment in which these items are used may require test setups different from those described in this document. Users of this standard practice may need to adapt the test procedure and setups described in Annex A to produce meaningful data for the users application.Organizations performing these tests will need to determine if on-going process characterization is necessary, and if so, the time interval between observations. It may also be important to make these observations when new products are introduced or when process changes occur. Examples of process changes may include tools, fixtures, equipment, new items/products, and additional manufacturing steps.The topics below are not addressed in this document:· Program Management:see ANSI/ESD S20.20 Protection of Electrical and Electronic Parts, Assemblies and Equipment (Excluding Electrically Initiated Explosive Devices)· Compliance Verification: see ESD TR53-01 Compliance Verification of ESD Protective Equipment and Materials· Troubleshooting: ESD TR53-01· ESD Program Certification: see ANSI/ESD S20.20 Certification Program at www.esda.org This document was designated ANSI/ESD SP17.1-2020 and approved on November 17, 2020.1 ESD Association Standard Practice: A procedure for performing one or more operations or functions that may or may not yield a test result. Note, if a test result is obtained it may not be reproducible. 8 IEC PAS 61340-5-6:2022 © IEC 2022At the time ANSI/ESD SP17.1-2020 was prepared, the 17.0 Subcommittee had the following members:Reinhold Gaertner, Co-Chair Infineon Technologies AGWolfgang Stadler, Co-Chair Intel Deutschland GmbHChristopher Almeras RaytheonDonn Bellmore Advanced ESD Services +Stephen Blackard Finisar CorporationRodney Doss Samtec, Inc.David N. Girard Stat