SEMIE5-0301SEMIEQUIPMENTCOMMUNICATIONSSTANDARD2MESSAGECONTENT原版完整文件.pdf

SEMI E5-0301 SEMI 1982,20011SEMI E5-0301SEMI EQUIPMENT COMMUNICATIONS STANDARD 2 MESSAGECONTENT(SECS-II)This standard was technically approved by the Global Information&Control Committee and is the directresponsibility of the North American Information&Control Committee.Current changes approved by theJapanese Regional Standards Committee on December 1,2000.Initially available at www.semi.org January2001;to be published March 2001.Originally published in 1982;previously published October 2000.NOTICE:The users attention is called to thepossibility that some implementations of this standard,particularly those related to the use of Stream 4,mayinvolve the use of inventions covered by U.S.patents4,884,674 and 5,216,613,and by other patents issued orpending,held by Texas Instruments Incorporated.Bypublication of this standard,SEMI takes no positionrespecting either the applicability or the validity ofthese or other patent rights asserted in connection withany item mentioned in this standard.Users of thisstandard are expressly advised that determination ofany such patent rights,and the risk of infringement ofsuch rights,are entirely their own responsibility.CONTENTS1 Introduction1.1 Intent1.2 Overview1.3 Application1.4 Applicable Documents2 Selected Definitions3 The Message Transfer Protocol3.1 Intent3.2 Messages3.2 Blocking Requirements3.2 Message Header3.2 The Transaction Timeout3.2 Multiple Open Transaction4 Streams and Functions4.1 Streams4.2 Functions4.3 Stream and Function Allocation5 Transaction and Conversation Protocols5.1 Intent5.2 Transaction Definition5.3 Transaction Level Requirements5.4 Conversation Protocols6 Data Structures6.1 Intent6.2 Item6.3 List6.4 Localized Character String Items6.5 Example Data Structures6.6 Data Item Dictionary6.7 Variable Item Dictionary6.8 Object Dictionary7 Message Detail7.1 Intent7.4 Stream 0 and Function 07.5 Stream 1 Equipment StatusS1,F0 Abort Transaction(S1F0)S1,F1 Are You There Request(R)S1,F2 On Line Data(D)S1,F3Selected Equipment Status Request(SSR)S1,F4Selected Equipment Status Data(SSD)S1,F5Formatted Status Request(FSR)S1,F6Formatted Status Data(FSD)S1,F7Fixed Form Request(FFR)S1,F8Fixed Form Data(FFD)S1,F9Material Transfer Status Request(TSR)S1,F10 Material Transfer Status Data(TSD)S1,F11 Status Variable NameList Request(SVNR)S1,F12 Status Variable NameList Reply(SVNRR)S1,F13 Establish Communications Request(CR)S1,F14 Establish Communications RequestAcknowledge(CRA)S1,F15 Request OFF-LINE(ROFL)S1,F16 OFF-LINE Acknowledge(OFLA)S1,F17 Request ON-LINE(RONL)S1,F18 ON-LINE Acknowledge(ONLA)Macro Level MessagesS1,F19 Get Attribute(GA)S1,F20 Attribute Data(AD)7.6 Stream 2 Equipment Control and DiagnosticsS2,F0Abort Transaction(S2F0)S2,F1Service Program Load Inquire(SPI)S2,F2Service Program Load Grant(SPG)S2,F3Service Program Send(SPS)S2,F4Service Program Send Acknowledge(SPA)S2,F5Service Program Load Request(SPR)SEMI E5-0301 SEMI 1982,20012S2,F6Service Program Load Data(SPD)S2,F7Service Program Run Send(CSS)S2,F8Service Program Run Acknowledge(CSA)S2,F9Service Program Results Request(SRR)S2,F10 Service Program Results Data(SRD)S2,F11 Service Program Directory Request(SDR)S2,F12 Service Program Directory Data(SDD)S2,F13 Equipment Constant Request(ECR)S2,F14 Equipment Constant Data(ECD)S2,F15 New Equipment Constant Send(ECS)S2,F16 New Equipment Constant Acknowledge(ECA)S2,F17 Date and Time Request(DTR)S2,F18 Date and Time Data(DTD)S2,F19 Reset/Initialize Send(RIS)S2,F20 Reset Acknowledge(RIA)S2,F21 Remote Command Send(RCS)S2,F22 Remote Command Acknowledge(RCA)S2,F23 Trace Initialize Send(TIS)S2,F24 Trace Initialize Acknowledge(TIA)S2,F25 Loopback Diagnostic Request(LDR)S2,F26 Loopback Diagnostic Data(LDD)S2,F27 Initiate Processing Request(IPR)S2,F28 Initiate Processing Acknowledge(IPA)S2,F29 Equipment Constant Namelist Request(ECNR)S2,F30 Equipment Constant Namelist(ECN)S2,F31 Date and Time Set Request(DTS)S2,F32 Date and Time Set Acknowledge(DTA)S2,F33 Define Report(DR)S2,F34 Define Report Acknowledge(DRA)S2,F35 Link Event Report(LER)S2,F36 Link Event Report Acknowledge(LERA)S2,F37 Enable/Disable Event Report(EDER)S2,F38 Enable/Disable Event ReportAcknowledge(EERA)S2,F39 Multi-block Inquire(DMBI)S2,F40 Multi-block Grant(DMBG)S2,F41 Host Command Send(HCS)S2,F42 Host Command Acknowledge(HCA)S2,F43 Reset Spooling Streams and Functions(RSSF)S2,F44 Reset Spooling Acknowledge(RSA)S2,F45 Define Variable Limit Attributes(DVLA)S2,F46 Variable Limit Attribute Acknowledge(VLAA)S2,F47 Variable Limit Attribute Request(VLAR)S2,F48 Variable Limit Attribute Send(VLAS)S2,F49 Enhanced Remote CommandS2,F50 Enhanced Remote CommandAcknowledge7.7 Stream 3 Material StatusS3,F0Abort Transaction(S3F0)S3,F1Material Status Request(MSR)S3,F2Material Status Data(MSD)S3,F3Time to Completion Request(TCR)S3,F4Time to Completion Data(TCD)S3,F5Material Found Send(MFS)S3,F6Material Found Acknowledge(MFA)S3,F7Material Lost Send(MLS)S3,F8Material Lost Acknowledge(MLA)S3,F9Material ID Equate Send(IES)S3,F10 Material ID Equate Acknowledge(IEA)S3,F11 Material ID Request(MIDR)S3,F12 Material ID Request Acknowledge(MIRA)S3,F13 Material ID Send(MIS)S3,F14 Material ID Acknowledge(MIA)S3,F15 Materials Multi-Block Inquire(MMBI)S3,F16 Materials Multi-Block Grant(MMBG)S3,F17 Carrier Action RequestS3,F18 Carrier Action AcknowledgeS3,F19 Cancel All Carrier Out RequestS3,F20 Cancel All Carrier Out AcknowledgeS3,F21 Port Group DefinitionS3,F22 Port Group Definition AcknowledgeS3,F23 Port Group Action RequestS3,F24 Port Group Action AcknowledgeS3,F25 Port Action RequestS3,F26 Port Action Acknowledge7.8 Stream 4 Material ControlS4,F0Abort Transaction(S4F0)S4,F1Ready to Send Material(RSN)S4,F2Ready to Send Acknowledge(RSA)S4,F3Send Material(SMN)S4,F4Not UsedS4,F5Handshake Complete(HCN)S4,F6Not UsedS4,F7Not Ready to Send(ABN)S4,F8Not UsedS4,F9Stuck in Sender(SSN)S4,F10 Not UsedS4,F11 Stuck in Receiver(SRN)S4,F12 Not UsedS4,F13 Send Incomplete Timeout(SIN)S4,F14 Not UsedS4,F15 Material Received(MRN)S4,F16 Not UsedS4,F17 Request to Receive(RTR)S4,F18 Request to Receive Acknowledge(RRA)Macro Level MessagesS4,F19 Transfer Job Create(TJ)S4,F20 Transfer Job Acknowledge(TJA)S4,F21 Transfer Job Command(TJC)S4,F22 Transfer Command Acknowledge(TCA)S4,F23 Transfer Job Alert(TJA)SEMI E5-0301 SEMI 1982,20013S4,F24 Transfer Alert Acknowledge(TLA)S4,F25 Multi-Block Inquire(MBI4)S4,F26 Multi-Block Grant(MBG4)Micro Level MessagesS4,F27 Handoff Ready(HR)S4,F28 Not UsedS4,F29 Handoff Command(HC)S4,F30 Not UsedS4,F31 Handoff Command Complete(HCC)S4,F32 Not UsedS4,F33 Handoff Verify(HV)S4,F34 Not UsedS4,F35 Handoff Cancel Ready(HCR)S4,F36 Not UsedS4,F37 Handoff Cancel Ready Acknowledge(HCA)S4,F38 Not UsedS4,F39 Handoff Halt(HH)S4,F40 Not UsedS4,F41 Handoff Halt Acknowledge(HHA)S4,F42 Not Used7.9 Stream 5 Exception HandlingS5,F0Abort Transaction(S5F0)S5,F1Alarm Report Send(ARS)S5,F2Alarm Report Acknowledge(ARA)S5,F3Enable/Disable Alarm Send(EAS)S5,F4Enable/Disable Alarm Acknowledge(EAA)S5,F5List Alarms Request(LAR)S5,F6List Alarm Data(LAD)S5,F7List Enabled Alarm Request(LEAR)S5,F8List Enabled Alarm Data(LEAD)S5,F9Exception Post Notify(EXPN)S5,F10 Exception Post Confirm(EXPC)S5,F11 Exception Clear Notify(EXCN)S5,F12 Exception Clear Confirm(EXCC)S5,F13 Exception Recover Request(EXRR)S5,F14 Exception Recover Acknowledge(EXRA)S5,F15 Exception Recovery Complete Notify(EXRCN)S5,F16 Exception Recovery Complete Confirm(EXRCC)S5,F17 Exception Recovery Abort Request(EXRAR)S5,F18 Exception Recovery Abort Acknowledge(EXRAA)7.10 Stream 6 Data CollectionS6,F0Abort Transaction(S6F0)S6,F1Trace Data Send(TDS)S6,F2Trace Data Acknowledge(TDA)S6,F3Discrete Variable Data Send(DVS)S6,F4Discrete Variable Data Acknowledge(DVA)S6,F5Multi-block Data Send Inquire(MBI)S6,F6Multi-block Grant(MBG)S6,F7Data Transfer Request(DDR)S6,F8Data Transfer Data(DDD)S6,F9Formatted Variable Send(FVS)S6,F10 Formatted Variable Acknowledge(FVA)S6,F11 Event Report Send(ERS)S6,F12 Event Report Acknowledge(ERA)S6,F13 Annotated Event Report Send(AERS)S6,F14 Annotated Event Report Acknowledge(AERA)S6,F15 Event Report Request(ERR)S6,F16 Event Report Data(ERD)S6,F17 Annotated Event Report Request(AERR)S6,F18 Annotated Event Report Data(AERD)S6,F19 Individual Report Request(IRR)S6,F20 Individual Report Data(IRD)S6,F21 Annotated Individual Report(AIR)S6,F22 Annotated Individual Report Data(AIRD)S6,F23 Request Spooled Data(RSD)S6,F24 Request Spooled DataAcknowledgement Send(RSDAS)S6,F25 Notification Report SendS6,F26 Notification Report Send AcknowledgeS6,F27 Trace Report Send(TRS)S6,F28 Trace Report Send Acknowledge(TRSA)S6,F29 Trace Report Request(TRR)S6,F30 Trace Report Data(TRD)7.11 Stream 7 Process Program ManagementS7,F0Abort Transaction(S7F0)S7,F1Process Program Load Inquire(PPI)S7,F2Process Program Load Grant(PPG)S7,F3Process Program Send(PPS)S7,F4Process Program Acknowledge(PPA)S7,F5Process Program Request(PPR)S7,F6Process Program Data(PPD)S7,F7Process Program ID Request(PIR)S7,F8Process Program ID Data(PID)S7,F9M/P M Request(MMR)S7,F10 M/P M Data(MMD)S7,F11 M/P M Update Send(UMS)S7,F12 M/P M Update Acknowledge(UMA)S7,F13 Delete M/P M Entry Send(DES)S7,F14 Delete M/P M Entry Acknowledge(DEA)S7,F15 Matrix Mode Select Send(MMS)S7,F16 Matrix Mode Select Acknowledge(MMA)S7,F17 Delete Process Program Send(DPS)S7,F18 Delete Process Program Acknowledge(DPA)S7,F19 Current EPPD Request(RER)SEMI E5-0301 SEMI 1982,20014S7,F20 Current EPPD Data(RED)S7,F21 Equipment Process Capabilities Request(PCR)S7,F22 Equipment Process Capabilities Data(PCD)S7,F23 Formatted Process Program Send(FPS)S7,F24 Formatted Process ProgramAcknowledge(FPA)S7,F25 Formatted Process Program Request(FPR)S7,F26 Formatted Process Program Data(FPD)S7,F27 Process Program Verification Send(PVS)S7,F28 Process Program VerificationAcknowledge(PVA)S7,F29 Process program Verification Inquire(PVI)S7,F30 Process Program Verification Grant(PVG)S7,F31 Verification Request Send(VRS)S7,F32 Verification Request Acknowledge(VRA)S7,F33 Process Program Available Request(PAR)S7,F34 Process Program Availability Data(PAD)S7,F35 Process Program for MID Request(PPMR)S7,F36 Process Program for MID Data(PPMD)7.12 Stream 8 Control Program TransferS8,F0Abort Transaction(S8F0)S8,F1Boot Program Request(BPR)S8,F2Boot Program Data(BPD)S8,F3Executive Program Request(EPR)S8,F4Executive Program Data(EPD)7.13 Stream 9 System ErrorsS9,F0Abort Transaction(S9F0)S9,F1Unrecognized Device ID(UDN)S9,F2Not UsedS9,F3Unrecognized Stream Type(USN)S9,F4Not UsedS9,F5Unrecognized Function Type(UFN)S9,F6Not UsedS9,F7Illegal Data(IDN)S9,F8Not UsedS9,F9Transaction Timer Timeout(TTN)S9,F10 Not UsedS9,F11 Data Too Long(DLN)S9,F12 Not UsedS9,F13 Conversation Timeout(CTN)S9,F14 Not Used7.14 Stream 10 Terminal ServicesS10,F0 Abort Transaction(S10F0)S10,F1 Terminal Request(TRN)S10,F2 Terminal Request Acknowledge(TRA)S10,F3 Terminal Display,Single(VTN)S10,F4 Terminal Display,Single Acknowledge(VTA)S10,F5 Terminal Display,Multi-block(VTN)S10,F6 Terminal Display,Multi-blockAcknowledge(VMA)S10,F7 Multi-block Not Allowed(MNN)S10,F8 Not UsedS10,F9 Broadcast(BCN)S10,F10 Broadcast Acknowledge(BCA)7.15 Stream 11 Host File Services(Deleted)7.16 Stream 12 Wafer MappingS12,F0Abort Transaction(S12F0)S12,F1Map Set-Up Data Send(MSDS)S12,F2Map Set-up Data Acknowledge(MSDA)S12,F3Map Set-up Data Request(MSDR)S12,F4Map Set-up Data(MSD)S12,F5Map Transmit Inquire(MAPTI)S12,F6Map Transmit Grant(MAPTG)S12,F7Map Data Send Type 1(MDS1)S12,F8Map Data Acknowledge Type 1(MDA1)S12,F9Map Data Send Type 2(MDS2)S12,F10Map Data Acknowledge Type 2(MDA2)S12,F11Map Data Send Type 3(MDS3)S12,F12Map Data Acknowledge 3(MDA3)S12,F13Map Data Request Type 1(MDR1)S12,F14Map Data Type 1(MD1)S12,F15Map Data Request Type 2(MDR2)S12,F16Map Data Type 2(MD2)S12,F17Map Data Request Type 3(MDR3)S12,F18Map Data Type 3(MD3)S12,F19Map Error Report Send(MERS)S12,F20Not Used7.17 Stream 13 Data Set TransfersS13,F0Abort Transaction(S13F0)S13,F1Send Data Set Send(DSSS)S13,F2Send Data Set Acknowledge(DSSA)S13,F3Open Data Set Request(DSOR)S13,F4Open Data Set Data(DSOD)S13,F5Read Data Set Request(DSRR)S13,F6Read Data Set Data(DSRD)S13,F7Close Data Set Send(DSCS)S13,F8Close Data Set Acknowledge(DSCA)S13,F9Reset Data Set Send(DSRS)S13,F10Reset Data Set Acknowledge(DSRA)S13,F11Data Set Object Multi-Block Inquire(DSOMGI)S13,F12Data Set Object Multi-Block Grant(DSOMBG)S13,F13Table Data Send(TDS)SEMI E5-0301 SEMI 1982,20015S13,F14Table Data Acknowledge(TDA)S13,F15Table Data Request(TDR)S13,F16Table Data(TD)7.18 Stream 14 Object ServicesS14,F0Abort Transaction(S14F0)S14,F1GetAttr Request(GAR)S14,F2GetAttr Data(GAD)S14,F3SetAttr Request(SAR)S14,F4SetAttr Data(SAD)S14,F5GetType Request(GTR)S14,F6GetType Data(GTD)S14,F7GetAttrName Request(GANR)S14,F8GetAttrName Data(GAND)S14,F9Create Object Request(COR)S14,F10Create Object Acknowledge(CAO)S14,F11Delete Object RequestS14,F12Delete Object Acknowledge(DOA)S14,F13Object Attach Request(OAR)S14,F14Object Attach Acknowledge(OAA)S14,F15Attached Object Action Request(AOAR)S14,F16Attached Object Action AcknowledgeAOAA)S14,F17Supervised Object Action RequestSOAR)S14,F18Supervised Object ActionAcknowledge(SOAA)S14,F19Generic Service Request(GSR)S14,F20Generic Service Acknowledge(GSA)S14,F21Generic Service CompletionInformation(GSCI)S14,F22Generic Service CompletionAcknowledge(GSCA)S14,F23Multi-block Generic Service DataInquire(GSDI)S14,F24Multi-block Generic Service DataGrant(GSDG)S14,F25Get Service Name Request(GSNR)S14,F26Get Service Name Data(GSND)S14,F27Get Service Parameter Name Request(GPNR)S14,F28Get Service Parameter Name Request(GPND)7.19 Stream 15 Recipe ManagementS15,F0Abort Transaction(S15F0)S15,F1Recipe Management Multi-blockInquireS15,F2Recipe Management Multi-blockGrantS15,F3Recipe Namespace Action RequestS15,F4Recipe Namespace ActionAcknowledgeS15,F5Recipe Namespace Rename RequestS15,F6Recipe Namespace RenameAcknowledgeS15,F7Recipe Space RequestS15,F8Recipe Space DataS15,F9Recipe Status RequestS15,F10Recipe Status DataS15,F11Recipe Version RequestS15,F12Recipe Version DataS15,F13Recipe Create RequestS15,F14Recipe Create AcknowledgeS15,F15Recipe Store RequestS15,F16Recipe Store AcknowledgeS15,F17Recipe Retrieve RequestS15,F18Recipe Retrieve DataS15,F19Recipe Rename RequestS15,F20Recipe Rename AcknowledgeS15,F21Recipe Action RequestS15,F22Recipe Action AcknowledgeS15,F23Recipe Descriptor RequestS15,F24Recipe Descriptor DataS15,F25Recipe Parameter Update RequestS15,F26Recipe Parameter UpdateAcknowledgeS15,F27Recipe Download RequestS15,F28Recipe Download AcknowledgeS15,F29Recipe Verify RequestS15,F30Recipe Verify AcknowledgeS15,F31Recipe Unload RequestS15,F32Recipe Unload DataS15,F33Recipe Select RequestS15,F34Recipe Select AcknowledgeS15,F35Recipe Delete RequestS15,F36Recipe Delete AcknowledgeS15,F37DRNS Segment Approve ActionRequestS15,F38DRNS Segment Approve ActionAcknowledgeS15,F39DRNS Recorder Segment RequestS15,F40DRNS Recorder SegmentAcknowledgeS15,F41DRNS Recorder Modify RequestS15,F42DRNS Recorder Modify