中科院 微电子机械系统设计(MEMS)课件.pptx
Introduction to MEMS Spring 2012Weidong YiDesign,Analysis,Fabrication2021/9/121Course OverviewnPart 1 Introduction to MEMS nPart 2 Microfabrication FundamentalsnPart 3 Microsystem Fabrication Processes nPart 4 Mechanics,and TransductionnPart 5 Electronic Interface Design PrinciplesnPart 6 MEMS Design Case StudiesnTextsbook:n1.Stephen D.Senturia,Microsystem Design,Kluwer Academic Press,2001n2.Course Reader(Selected Reference Papers)2021/9/122Part 1Introduction to MEMS2021/9/123What are the Goals of this Course?nAccessible to a broad audience minimal prerequisitesnDesign emphasis exposure to the techniques useful in analytical design of structures,transducers,and process flowsnPerspective on MEMS research and commercialization circa2021/9/124Course MechanicsnLectures:Monday,Wednesday 10:00-12:00 nHomework:bi-weekly assignments distributed on Thursdays and due the following Thursday at the class beginningnExam:(TBA)nOffice Hours:(TBA)nCredit breakdown(approximate)10%homework 30%final Project 60%final exam2021/9/125Lecture Outlinen Todays LecturenWhat is MEMS nHistorical tour of MEMSnMEMS and nanotechnology2021/9/126nMicro ElectroMechanical SystemsMEMS Defined2021/9/127What is MEMSnMEMS involve both electronic and non-electronic elementsnthermal,magnetic,fluidic and optical devicesnMEMS are“systems”in the true sensenPackaging,system partitioning into components,calibration,signal-to-noise ration,stability,reliabilitynMEMS may involve large arrays of microfabricated elementsnDNA array,infrared imaging devices,both reflective and refractive projection displays2021/9/128Examples of MEMS Devices ninkjet-printer cartridges naccelerometersnMicroenginesn inertial sensors n micromirrors,n optical scannersn fluid pumps,chemical,pressure and flow sensors.nBiosensors2021/9/129Dimensional Rangesn1 mm L 300 mm lateral dimensionsSurface micromachined structures “classic MEMS”n300 mm L 3 mmBulk silicon/wafer bonded structures still call them MEMS and cover them in this coursen10 nm L 2015 Non-volatile memories Communications2021/9/1252MEMS Market and Industry Studies2021/9/1253MEMS Market and Industry StudiesnMicro-electro-mechanical systems(MEMS)are one of the fastest growing technology areas,with sales of around$5 billion.They are expected to grow at an average annual rate of more than 20%over the rest of the decade.nThe growth in the use of MEMS has also led to the creation of supporting industries in areas such as nMEMS design software,nDesign services,nSpecialty fabrication equipmentnFabrication facilities.2021/9/1254MEMS Market and Industry Studies2021/9/1255MEMS市场要点市场要点 nMEMS仍然是一个分散的市场：鲜有MEMS应用市场规模超过2亿美元。nMEMS现在提供至关重要的增值功能。n新型MEMS应用商业化的时间更短。n消费电子市场需要8英寸晶圆制造线。n需要简化制造流程：n MEMS定律：“一种产品，一种工艺，一种封装”，nMEMS封装显然是增加成本的重要环节。2021/9/1256MEMS公司公司 2021/9/1257MEMS代工 2021/9/1258Future2021/9/1259Futuren物联网是中国未来发展的经济引擎，发展物联网将对中国未来国际政治经济地位产生重大影响。而“传感”做为物联网中的核心环节之一，将催生中国的MEMS产业蓬勃发展。2021/9/1260MEMS Market and Industry Studiesn市场调研公司I n-S t a t/M D R Stat/MDR(http:/)日前指出MEMS器件制造设备正在成为半导体设备市场领域的亮点。目前全球有60家左右的MEMS制造工厂，上百家MEMS领域的新兴公司以及更多的大学和研究机构。他们构成了MEMS设备的市场基础。无论兼顾MEMS的半导体生产设备还是专门用于MEMS的设备目前的销售都还不错 2021/9/1261
