《半导体物理与器件》第四版答案第十章(共17页).doc
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1、精选优质文档-倾情为你奉上Chapter 10专心-专注-专业10.1 (a) p-type; inversion (b) p-type; depletion (c) p-type; accumulation (d) n-type; inversion_10.2(a) (i) V cm or m (ii) V cm or m(b) V so cm (i) V cm or m (ii) V cm or m_10.3(a) 1st approximation: Let V Then cm 2nd approximation: V Then cm(b) V V_10.4 p-type silicon
2、 (a) Aluminum gate We have V Then or V (b) polysilicon gate or V (c) polysilicon gate or V_10.5 V V_10.6(a) cm(b) Not possible - is always positive.(c) cm_10.7 From Problem 10.5, V (a) F/cm V(b) F/cm V_10.8(a) V V(b) F/cm (i) V (ii) V(c) V F/cm (i) V (ii) V_10.9 where V Then or V Now or We have or F
3、/cm So now C/cm or cm_ 10.10 V cm C/cm F/cm (a) n poly gate on p-type: V V(b) p poly gate on p-type: V V(c) Al gate on p-type: V V_10.11 V cm C/cm F/cm (a) n poly gate on n-type: V V(b) p poly gate on n-type: V V(c) Al gate on n-type: V V_10.12 V The surface potential is V We have V Now We obtain or
4、 cm Then or C/cm We also find or F/cm Then or V_10.13 F/cm C/cm By trial and error, let cm. Now V cm C/cm V Then Then VV_10.14 F/cm C/cm By trial and error, let cm Now V cm C/cm V Then Then V, which is within the specified value._10.15 We have F/cm C/cm By trial and error, let cm Now V cm C/cm V The
5、n V Then V V which meets the specification._10.16(a) V F/cm Now V(b) V cm C/cm Now or V_10.17 (a) We have n-type material under the gate, so where V Then or cmm (b) For an polysilicon gate, or V Now or C/cm We have C/cm We now find or V_10.18 (b) where V and V Then or V (c) For We find or cmm Now or
6、 C/cm Then or VV_10.19 Plot_10.20 Plot_10.21 Plot_10.22 Plot_10.23(a) For Hz (low freq), F/cm F/cm Now V cm Then F/cm (inv)F/cm(b) MHz (high freq), F/cm (unchanged) F/cm (unchanged) F/cm (unchanged) (inv)F/cm(c) V Now C/cm V_10.24(a) Hz (low freq), F/cm F/cm Now V cm Then F/cm (inv)F/cm(b) MHz (high
7、 freq), F/cm (unchanged) F/cm (unchanged) F/cm (unchanged) (inv)F/cm(c) V Now C/cm Then V_10.25 The amount of fixed oxide charge at x is C/cm By lever action, the effect of this oxide charge on the flatband voltage is If we add the effect at each point, we must integrate so that _10.26 (a) We have T
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