2022年场发射穿透式电子显微镜简介 .pdf

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1、90201929http:/.tw*X(FE-TEM)(EDS)(EELS)(High Resolution Lattice Image)(STEM)(FieldEmission Transmission ElectronMicroscope; FE-TEM)TEM(Cold Field Emission)(Schottky Emission)(Brightness)(a)(b)(Tunneling Effect)名师资料总结 - - -精品资料欢迎下载 - - - - - - - - - - - - - - - - - - 名师精心整理 - - - - - - - 第 1 页，共 9 页 -

2、 - - - - - - - - http:/.tw92920191(100)ZrOZrOX(X-ray Energy DispersiveSpectroscopy; EDS)(Electron Energy Loss Spectroscopy; EELS)(a)(b)(b)(a)SchottkyV1V2Cold FieldSchottkyFieldEmissionEmissionWLaB6W(310)ZrO/W(100)(K)280019003001800(nm)6000010000 100 1000(A/cm2)330170005300Brightness1041052 107107(A/

3、cm2.sr.kV)(eV)0.590.40.260.31(torr) 10-5 10-6 10-10 10-8(hr)200100020002000名师资料总结 - - -精品资料欢迎下载 - - - - - - - - - - - - - - - - - - 名师精心整理 - - - - - - - 第 2 页，共 9 页 - - - - - - - - - 92201929http:/.tw(Scanning Transmission Elec-tron Microscope; STEM)(High Angle AnnularDark Field; HAADF)(1)(High-reso

4、lution TEM; HRTEM)TEM(Bright Field)(DarkField)(Amplitude Contrast)(PhaseContrast)(20nm)(Weak Phase Object)(FirstBorn Approximation)e(x,y) = exp(ip(x,y) 1 ip(x, y) (1)p(x,y) =t/2t/2 (x, y)dz(Electrostatic Potential) =2 me /h2(Positive Inter-action Constant)EwaldLaue Zone(Point SpreadFunction)I(x, y)

5、= 1 + 2p( x, y) * ?sin (u)P(u) (2)?1 / d =|u|= / = u(Bragg名师资料总结 - - -精品资料欢迎下载 - - - - - - - - - - - - - - - - - - 名师精心整理 - - - - - - - 第 3 页，共 9 页 - - - - - - - - - http:/.tw92920193Angle) B(2)(Spherical Aberration Constant)(PointResolution)dp= 0.66Cs1/ 43/ 4(3)(Information Limit)di(?)= 2/ (?) 1 /

6、2(4)(Energy Spread)JEOL2000EX(Cs=1mm)0.66(1*106)1/40.002513/4=0.23nmJEOL 2010F(Cs=0.5mm)0.66(0.5*106)1/40.002513/4=0.19nmHREMAuto Tune(Astigmatism)CNTEDSJEOL JEM-2010F0.5nmXXInPGaAs-InP(5)AOAsGaPInInGaBOPInIn6050403020100ABGaAsInPPInAsGaat.%名师资料总结 - - -精品资料欢迎下载 - - - - - - - - - - - - - - - - - - 名师

7、精心整理 - - - - - - - 第 4 页，共 9 页 - - - - - - - - - 94201929http:/.tw(EDS)InPGaAs/InPInPGaAs1nmEDSGaAs(ConvergentBeam Electron Diffraction; CBED)(Back Focal Plane)(Diffraction Pattern)(Selected AreaDiffraction; SAD)(Disc)(Space Group)EDS(Convergent BeamImaging; CBIM)(2)(Scanning Transmission ElectronMi

8、croscope)JEOL JEM-2010F0.2nm(S)TEMSTEMCBED(2)2s2s2s名师资料总结 - - -精品资料欢迎下载 - - - - - - - - - - - - - - - - - - 名师精心整理 - - - - - - - 第 5 页，共 9 页 - - - - - - - - - http:/.tw92920195(3)TEMSTEMSTEMHAADF(a)50150mradZ2(b)SiSiGeHAADFSiGeSiHAADFSrTiO3TEMSTEM Image(4)SrTiO3 TEM ImageSrTiO3 STEM ImageFE tipElect

9、ronic signalsCondenser lensSpecimenObjective lensScan coilsElectronic controlSTEM(S)TEMField emission tipHighvoltagepowersupplyScreen, camerasSTEM detectorsSTEMTEM(S)TEM(3)(a)HAADF(5)(b)SiSiGe HAADF(4)MonitorAnnularDetectorScattered ElectronsElectron Probe(a)(b)名师资料总结 - - -精品资料欢迎下载 - - - - - - - - -

10、 - - - - - - - - - 名师精心整理 - - - - - - - 第 6 页，共 9 页 - - - - - - - - - 96201929http:/.tw(Linescan)(Mapping)10nmBiZnSbEDSAsPSTEMEDS MappingGatan(Energy Filter)1008060402002016128406420246ZnBiSbSb,Bi(at.%)Zn(at.%)Distance (nm)ZnO(5)(Energy-filtering TEMEF-TEM) (Spectroscopic Imaging )EDS STEM Mapping(5

11、)名师资料总结 - - -精品资料欢迎下载 - - - - - - - - - - - - - - - - - - 名师精心整理 - - - - - - - 第 7 页，共 9 页 - - - - - - - - - http:/.tw92920197I (x, y, ? E)(Spectrum-Imaging) (Electron EnergyLoss Spectrum) (Image-Spectrum)(Elemental Mapping)1. (Zero-Loss Peak)12eV0.3eV2. (Plasmon Loss Peak)(Plasmon)1050eV3. (Core Lo

12、ss Peak)50eV(Core Loss)SiSiEELS(5)ABCSi4+ (108 eV)Energy Loss (eV)Si2+ (103 eV)Si0+ (100 eV)Counts名师资料总结 - - -精品资料欢迎下载 - - - - - - - - - - - - - - - - - - 名师精心整理 - - - - - - - 第 8 页，共 9 页 - - - - - - - - - 98201929http:/.tw(Two-Window Method)(Three-Window Method)EELS(50100%)1.2.3. Introduction to Sc

13、anning Transmission ElectronMicroscopyRobert J. Keyse.4.5. JEOLEELS(5)(1)(Chromatic Aberration)(Phase Contrast)(1)AlTiNTiSi50nmSiO2Zero Loss ImageOxygen MapAluminum MapTitanium MapNitrogen Map名师资料总结 - - -精品资料欢迎下载 - - - - - - - - - - - - - - - - - - 名师精心整理 - - - - - - - 第 9 页，共 9 页 - - - - - - - - -