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1、-1. MMF Multi Media Filter多介质过滤器2 AC Active Carbon活性炭过滤器3 WC Weak Cation弱阳树脂塔4 2B Cation and Anion阳床,阴床5 DG Degasifier脱气塔6 RO Reverse Osmosis反渗透过滤7 MB Mixed Bed混床8 MDG Membrane Degasifier膜脱气9 UV Ultraviolate Desinfector紫外线杀菌机10 TOC-UV TOC Ultravoilate Desinfector紫外线除TOC杀菌机11 UF Ultrafilter超过滤12 PAC
2、Poly Alumina Chlorine聚合氯化铝13 DO Dissoved Oxygen溶解氧14 TOC Total Organic Carbon总有机碳15 DI Deionization去除离子16 SC Strong Cation强阳树脂塔17 WA/SA Weak Anion / Strong Anion弱阴/强阴树脂塔18 SDI Silt Density Index污染密度指数19 TUB Turbidity浊度20 RO CONC. RO Concentration Water RO浓缩水21 RO PERMEATE RO Permeate Water RO产水22 SS
3、 Suspendid Solid matter悬浮物质23 COD Chemical Oxygen Demand化学需氧量24 BOD Biological Oxygen Demand生物需氧量25 CMP Chemical Mechanical Polisher化学机械研磨26 BG Backside Grinding晶背研磨27 SF Sand filter石英砂过滤器28 FA Fluoride Absorber氟离子吸收塔29 AA Active Al2O3活性Al2O330 LSC Local Solvent Collection Cabinet现场溶剂收集槽31 PAM Polya
4、erylamide(Polymer)聚丙烯酰胺40 DWWA Acid/Caustic waste water drain piping一般酸碱排放管路41 DCHF concentrate hydrofluoric acid浓氢氟酸排放管路42 DDHF dilute hydrofluoric acid稀氢氟酸排放管路43 DB/GWbackside grounding water晶背研磨排放管路44 DFRW-Cu first rinse water in Copper line铜制程初道冲洗水排放管路45 DLRW last rinse water后道冲洗水排放管路46 DCMP-cle
5、an Chemical mechanical polish clean water化学机械抛光废水排放管路47 DF-FAB floor drain in FAB地板排水排放管路48 DIPA IPA异丙醇排放管路49 Dsolvent-1 solvent-1有机溶剂-1排放管路50 PDS Process drain sys.制程排水系统52 DH2SO4-Cu Cu line Sulphuric acid drain铜制程初硫酸废液排放管路53 DH2 SO4 Sulphric acid drain硫酸废液排放管路54 DH3PO4 Phosphoric acid drain磷酸废液排放管
6、路55 PVC Polyvinyl Chloride聚氯乙烯56 CPVC Chlorinated Polyvinyl Chloride氯化聚氯乙烯57 PE Polyethylene聚乙烯58 PP Polypropylene (Homopolymer)聚丙烯59 PTFE Polytetrafluorethylene聚四氟乙烯60 PVDF (KYNAR) Polyvinylidene Fluoride聚偏二氟乙烯61 DW Domestic Water生活用水62 PW Process water生产用水63 DWW Domestic Warm Water生活温水64 MW Middle
7、 Water中水65 RWRS Rain Water Reuse System雨水回收系统66 IWWS Industrial Waste Water System工业污废水排水系统67 EEW Emergency Eye Washer紧急冲身洗眼器69 HEPA High Efficiency Particulate Air Filter高效过滤器11 H2SO4 Sulfuric Acid硫酸12 HCL Hydrochloric Acid盐酸13 HNO3 Nitric Acid硝酸14 H3PO4 Phosphoric Acid磷酸15 HF Hydrofluoric acid氢氟酸16 H2O2 Hydrogen Peroxide过氧化氢(双氧水)17 IPA 2-Propanol异丙醇19 NH4OH Ammonia (liquid )氨水25 VMB Valve Manifold Box阀箱-第 11 页-
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