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场发射穿透式电子显微镜简介.pdf

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1、90201929http:/.tw*X(FE-TEM)(EDS)(EELS)(High Resolution Lattice Image)(STEM)(FieldEmission Transmission ElectronMicroscope;FE-TEM)TEM(Cold Field Emission)(Schottky Emission)(Brightness)(a)(b)(Tunneling Effect)http:/.tw92920191(100)ZrOZrOX(X-ray Energy DispersiveSpectroscopy;EDS)(Electron Energy Loss

2、Spectroscopy;EELS)(a)(b)(b)(a)SchottkyV1V2Cold FieldSchottkyFieldEmissionEmissionWLaB6W(310)ZrO/W(100)(K)280019003001800(nm)6000010000 100 1000(A/cm2)330170005300Brightness1041052 107107(A/cm2.sr.kV)(eV)0.590.40.260.31(torr)10-5 10-6 10-10 10-8(hr)200100020002000文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H

3、4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文

4、档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB

5、7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6

6、Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 H

7、J10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H

8、9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9

9、ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q392201929http:/.tw(Scanning Transmission Elec-tron Microscope;STEM)(High Angle AnnularDark Field;HAADF)(1)(High-resolution

10、 TEM;HRTEM)TEM(Bright Field)(DarkField)(Amplitude Contrast)(PhaseContrast)(20nm)(Weak Phase Object)(FirstBorn Approximation)e(x,y)=exp(ip(x,y)1 ip(x,y)(1)p(x,y)=t/2t/2(x,y)dz(Electrostatic Potential)=2 me/h2(Positive Inter-action Constant)EwaldLaue Zone(Point SpreadFunction)I(x,y)=1+2p(x,y)*?sin (u)

11、P(u)(2)?1/d=|u|=/=u(Bragg文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B

12、2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K

13、9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q

14、7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q

15、3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:

16、CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10

17、L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3http:/.tw92920193Angle)B(2)(Spherical Aberration Constant)(

18、PointResolution)dp=0.66Cs1/43/4(3)(Information Limit)di(?)=2/(?)1/2(4)(Energy Spread)JEOL2000EX(Cs=1mm)0.66(1*106)1/40.002513/4=0.23nmJEOL 2010F(Cs=0.5mm)0.66(0.5*106)1/40.002513/4=0.19nmHREMAuto Tune(Astigmatism)CNTEDSJEOL JEM-2010F0.5nmXXInPGaAs-InP(5)AOAsGaPInInGaBOPInIn6050403020100ABGaAsInPPInA

19、sGaat.%文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q

20、3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:

21、CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10

22、L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2

23、 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B

24、2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K

25、9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q394201929http:/.tw(EDS)InPGaAs/InPInPGaAs1nmEDSGaAs(ConvergentBeam Electron Di

26、ffraction;CBED)(Back Focal Plane)(Diffraction Pattern)(Selected AreaDiffraction;SAD)(Disc)(Space Group)EDS(Convergent BeamImaging;CBIM)(2)(Scanning Transmission ElectronMicroscope)JEOL JEM-2010F0.2nm(S)TEMSTEMCBED(2)2s2s2s文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7

27、H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3

28、文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:C

29、B7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L

30、6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2

31、HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2

32、H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9

33、 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3http:/.tw92920195(3)TEMSTEMSTEMHAADF(a)50150mradZ2(b)SiSiGeHAADFSiGeSiHAADFSrTiO3TEMSTEM Image(4)SrTiO3 TEM ImageSrTiO3 STEM ImageFE tipElectronic signalsCondense

34、r lensSpecimenObjective lensScan coilsElectronic controlSTEM(S)TEMField emission tipHighvoltagepowersupplyScreen,camerasSTEM detectorsSTEMTEM(S)TEM(3)(a)HAADF(5)(b)SiSiGe HAADF(4)MonitorAnnularDetectorScattered ElectronsElectron Probe(a)(b)文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2

35、HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2

36、H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9

37、 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7

38、H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3

39、文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:C

40、B7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L

41、6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q396201929http:/.tw(Linescan)(Mapping)10nmBiZnSbEDSAsPSTEMEDS MappingGatan(Energy Filter)1008060402002016128406420246ZnBiSbSb,Bi(at.%)Zn(at.%)Dist

42、ance(nm)ZnO(5)(Energy-filtering TEMEF-TEM)(Spectroscopic Imaging)EDS STEM Mapping(5)文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:C

43、B7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L

44、6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2

45、HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2

46、H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9

47、 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7

48、H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3

49、http:/.tw92920197I(x,y,?E)(Spectrum-Imaging)(Electron EnergyLoss Spectrum)(Image-Spectrum)(Elemental Mapping)1.(Zero-Loss Peak)12eV0.3eV2.(Plasmon Loss Peak)(Plasmon)1050eV3.(Core Loss Peak)50eV(Core Loss)SiSiEELS(5)ABCSi4+(108 eV)Energy Loss(eV)Si2+(103 eV)Si0+(100 eV)Counts文档编码:CB7Y10L6Y8G2 HJ10B2

50、H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9 ZL7Q7H4L5Q3文档编码:CB7Y10L6Y8G2 HJ10B2H9Y4K9

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