微电子专业英语课件精.ppt
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1、微微电子子专业英英语课件件第1页,本讲稿共73页 Zhang HongChangzhou College of Information TechnologyMicro-electronic Professional English第2页,本讲稿共73页Chapter I History Unit 1vThe first seven bench diffusion furnaces used in the corner of Fairchilds Palo Alto facility were very similar to furnaces used by Shockley Semicondu
2、ctor.The First Transistor in Fairchilddiffusion n.扩散,传播扩散,传播 diffusion furnaces 扩散炉扩散炉facility n.设施设施,容易容易,熟练熟练,设备设备Supplementary Words:diffusion capacitance 扩散电容第3页,本讲稿共73页v译文:处于困境中的仙童Palo Alto工厂使用的的第一批七台扩散炉和肖克莱半导体公司使用的扩散炉非常相似。第4页,本讲稿共73页vCecil A.Lasch,Jr.,a technician who worked at Fairchild,did m
3、ost of the work on the diffusion furnace hardware.译文:译文:Cecil A.Lasch,Jr,仙童公司的,仙童公司的技术员,在扩散炉硬件上作出了大量工技术员,在扩散炉硬件上作出了大量工作。作。第5页,本讲稿共73页vThe quartz tube of Fairchilds diffusion furnace had an inner diameter of 2 and a quartz liner between the processing tube and heating element.A very simple“variac”adj
4、ustable variable transformer was used to control the temperature of the single zone.quartz n.石英 tube n.管子,管,真空管 diameter n.直径 transformer n.变压器 Supplementary Words:quartz crystal 石英晶体 tube diode 真空二极管 第6页,本讲稿共73页v译文:仙童扩散炉的石英管内径,加工管和加热元件中间有一个石英衬垫。用一个非常简单的自耦变压器来控制单区的温度。第7页,本讲稿共73页vThe tube was equippe
5、d with a network of quartz pipes,quartz valves,and flowmeters.All systems resembled research laboratory equipment rather than industrial manufacturing equipment.pipe n.管子,笛子,烟斗,管乐器valve n.阀门,阀,瓣膜,瓣,闸阀 flowmeter n.流量计resemble v.像,很像,比拟 第8页,本讲稿共73页v译文:石英管配备有石英管、石英阀门和流量计组成的网络。所有系统都类似于研究实验设备,而不是工业制造设备。第
6、9页,本讲稿共73页vThe wafers were pushed into and pulled out of the tubes manually.Cooling of wafers usually took place in a cool zone within the diffusion tube,which allowed the wafers to cool to a temperature suitable for handling.wafers n.晶圆第10页,本讲稿共73页v译文:手动把晶圆送入和退出石英管。晶圆冷却通常在扩散管的阴凉区内进行,使晶圆冷却到适合处理的温度。第
7、11页,本讲稿共73页vThe programmed heating and cooling was not used because of the difficulty in maintaining good temperature profiles.profile n.规范概要Supplementary Words:Program Overview and File 程序概要和文件第12页,本讲稿共73页v译文:不使用程序加热和冷却是因为它难以保持良好的温度分布。第13页,本讲稿共73页vThe used gases were just emitted into the atmospher
8、e by vents placed just above diffusion tube exhausts.Supplementary Words:exhaust valve 排气阀 exhaust algorithm 穷举算法 vent n.通风口,开衩,通风孔,出口,排放exhaust n.排气,排气装置 第14页,本讲稿共73页v译文:通过扩散管排气孔上方的通风孔把使用的气体通入到特定空间中。第15页,本讲稿共73页vThere was no“clean room etiquette”,and the chain smoker Robert Noyce frequently smoked
9、in the Fairchild manufacturing facility.etiquette n.礼节,礼仪,道德规范chain smoker n.老烟枪 Supplementary Words:chain break 链中断 第16页,本讲稿共73页v译文:没有“洁净室规矩“,烟鬼Robert Noyce经常在仙童制造工厂内抽烟。第17页,本讲稿共73页vJay Last,who had a background in optics from the time of his studies at MIT,paired with Robert Noyce and designed con
10、tact masking equipment that aligned masks to the wafer flat.optics n.光学MIT(Massachusettes Institute of Technology)(美国)麻省理工学院align vt.排列,对准 Supplementary Words:optics design 光学设计第18页,本讲稿共73页v译文:最后,在麻省理工学院学习过光学的Jay和Robert Noyce搭档,设计出了和晶圆表面匹配的接触式掩模设备。第19页,本讲稿共73页vThe structure and dimension of the Fair
11、child mesa transistor was identical to the Bell Laboratories transistor 2N560.Shockley Laboratory was provided with all details of new Bell Labs devices and“The California Group”had full access to this information.mesa transistor n.台面型晶体管Supplementary Words:mesa diffusion 台面扩散 第20页,本讲稿共73页v译文:仙童台式晶体
12、管的结构和尺寸和贝尔实验室的晶体管2N560相同。肖克莱实验室提供了新的贝尔实验室的所有细节,“加州集团“已充分获得此信息。第21页,本讲稿共73页vThe geometry of the 2N560 and the Fairchild transistor was huge.The diameter of the mesa ring was approximately 750 m.Alignment error was not better than 100150 m.geometry n.几何,几何学,几何学书,图形 Supplementary Words:Geometry Theorem
13、 Prover 几何学定理证明第22页,本讲稿共73页v译文:2N560和仙童晶体管的几何形状都很大。台式环的直径大约750m。对准误差不超过100150 m。第23页,本讲稿共73页vThree masks were necessary to complete the transistors:1)Emitter region2)Base and emitter contacts3)Metalemitter n.发出者,发射体base n.基区 Supplementary Words:emitter follower射极跟随器 Base Band 基带第24页,本讲稿共73页v译文:完成晶体管
14、需要三个掩模:1)发射区2)基区和辐射源的接触3)金属第25页,本讲稿共73页vThe wafers were placed with their front side(resist)on the emulsion side of the masking plate,and exposed for 60 sec by mercury lamp.The exposed wafers were developed and backed.emulsion n.感光剂,乳状液masking plate n.掩膜板 expose v.使.曝光,使.处于,暴露,曝光mercury lamp n.汞灯 Su
15、pplementary Words:mercury tank 水银槽第26页,本讲稿共73页v译文:晶圆的前端(抗蚀剂)放置在掩膜板有感光剂的一侧,用汞灯曝光60秒。曝光后的晶圆显影、烘烤。第27页,本讲稿共73页vThere was a competition for six weeks between Gordon Moore and Jean Hoerni.Both transistor projects were successful,but the NPN transistor was easier to manufacture,mainly because of the conta
16、ct to the base.译文:Gordon Moore和Jean Hoerni有六个星期的竞争。两个晶体管方案都成功了,但是因为基极接触,NPN型晶体管更容易制造。第28页,本讲稿共73页vTo form an Aluminum ohmic contact to the moderately doped Antimony base of a PNP transistor is much more difficult than in the case of Boron doped base of an NPN transistor.aluminum n.ohmic adj.欧姆的 ohmi
17、c contact n.欧姆接触moderately adv.相当,不过分地 dope v.掺杂antimony n.锑 boron n.硼 Supplementary Words:ohmic resistance 欧姆电阻doped oxide diffusion 掺杂氧扩散 第29页,本讲稿共73页v译文:PNP晶体管中形成铝欧姆接触的中度掺杂锑基极比相同情况下NPN晶体管的硼掺杂基极要困难的多。第30页,本讲稿共73页vThe yield of the NPN transistors was higher and G.Moore,as head of group,had the powe
18、r to choose the NPN transistor as the first Fairchild transistor.Jean A.Hoerni was clearly unhappy that his PNP transistor did not prevail.Significant differences between Moores and Hoernis personalities only increased tension between Hoerni and his boss.yield n.成品率 prevail v.流行,优先,成功,获胜Supplementar
19、y Words:yield criteria 合格率标准第31页,本讲稿共73页v译文:NPN晶体管的产量较高,Gordon Moore作为集团的领导,有能力选择NPN晶体管作为第一个仙童晶体管。Jean Hoerni显然很不高兴,因为他的PNP晶体管并不占上风。Moore和Hoerni的性格的重大分歧使Hoerni和他的老板之间的关系更加紧张。第32页,本讲稿共73页vThe first 100 Fairchild transistors were mailed to IBM in July 1958.A tentative Specification for the 2N696 was i
20、ssued in August 1958 and an advertising campaign started in September 1958.The Fairchild silicon mesa transistors significantly improved several transistor parameters and there was no competitor who could offer similar products.第33页,本讲稿共73页tentative adj.试验的,暂时,犹豫的 advertising campaign n.广告宣传silicon
21、n.硅 Supplementary Words:tentative table of equipment 试行设备表 silicon MESFET process 硅金属半导体场效应晶体管工艺第34页,本讲稿共73页v译文:1958年7月,第一批个仙童晶体管邮寄给,1958年月发行的规格暂定为2N696,1958年月开始广告宣传。仙童硅晶体管大大提高了几个晶体管参数,也没有竞争对手提供类似的产品。第35页,本讲稿共73页vIn 1959,there were 26 companies manufacturing transistors and sales of transistors reac
22、hed approximately$0.8 Billion.译文:1959年,有个公司制造半导体,销售额约达亿美元。第36页,本讲稿共73页vIn November 1959 there was no product on the market that could compete with portfolio of eight Fairchild transistors.Despite that the yield of mesa transistors was very low,Fairchild sales reached$65,000.00 in July and August 195
23、8 because of the transistors high selling price.portfolio n.业务量despite prep.尽管第37页,本讲稿共73页v译文:1959年月,市场上没有任何产品可以和八仙童晶体管相竞争。尽管台式晶体管的产量很低,但是由于晶体管的售价很高,1958年月和月仙童的销售额高达.万美元。第38页,本讲稿共73页ExerciseAll systems resembled research laboratory equipment rather than industrial manufacturing equipment.The wafers
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