电子束镀膜机工作原理.pptx

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1、Basic operations of Electron beam evaporatorWang haominShen xiaonanBasic operation procedureCheck the pressure of nitrogen gases and Check the volume of the cooling water in the chiller.System loginVent the chamberLoad sampleSet the recipesRun the process to deposit thin filmsUnload samplesSet sampl

2、e to standbyCheck the N2 pressure and chiller water volumeWater need to be added when the volume is below half tank.System login1.Press the“enter”button2.Input your username and passwordVent the chamber3.Open the N2 valve 2.Turn off the auto pump1.Close the MV valveLoad the sample1.Open the door of

3、the chamber 2.Hold your sample to the sample holderSet and load Recipe1.Open file to find the material you want to deposit2.Set the thickness and rotary speed in the recipe,save and load the recipe Run the process to deposit thin films1.Go to manual operation to make a“record”at first.2.Go to proces

4、s operation to run the recipe loaded3.Observe the process through the window4.Adjust the e-beam position in the crucible when necessaryUnload the samplesWait the chamber temp below 50C,vent the chamber and unload the sample.Close the door of the chamber after unload the sample.Exit the System1.Make sure the auto pump is on.2.Make sure the high voltage is turned off before exit the system.3.Exit the systemMaterials for deposition in our evaporator