BSOB模式与BBOS模式完整版课件.ppt

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1、ASMASMASMTechnology SingaporeTechnology Singapore2 Yishun Avenue 7,Singapore 768924.Tel:(65)-7526311,Fax:(65)-75822872 Yishun Avenue 7,Singapore 768924.Tel:(65)-7526311,Fax:(65)-7582287 Soaring to New HeightsSoaring to New HeightsSoaring to New HeightsSoaring to New Heights1 1CHAPTER 6ASMASMASMTechn

2、ology SingaporeTechnology Singapore2 Yishun Avenue 7,Singapore 768924.Tel:(65)-7526311,Fax:(65)-75822872 Yishun Avenue 7,Singapore 768924.Tel:(65)-7526311,Fax:(65)-7582287 Soaring to New HeightsSoaring to New HeightsSoaring to New HeightsSoaring to New Heights2 2Bond Stick On Ball(BSOB)/Bond Ball On

3、 Stitch(BBOS)/Tail BreakASMASMASMTechnology SingaporeTechnology Singapore2 Yishun Avenue 7,Singapore 768924.Tel:(65)-7526311,Fax:(65)-75822872 Yishun Avenue 7,Singapore 768924.Tel:(65)-7526311,Fax:(65)-7582287 Soaring to New HeightsSoaring to New HeightsSoaring to New HeightsSoaring to New Heights3

4、31.0)BOND STICK ON BALL(BSOB)1.1)DescriptionThis bonding process is specially developed by ASM to handle multi-die(MCM)bonding application.In the conventional approach,if one is trying to connect the gold wire from one die to the another,a capillary mark of second bond will be evident on top of the

5、die which may damage the die.The BSOB process will solve this problem by bonding a ball onto the dies surface first,followed by bonding another wire where the second bonds wedge will be landing on top of this bonded ball(figure 1).ASMASMASMTechnology SingaporeTechnology Singapore2 Yishun Avenue 7,Si

6、ngapore 768924.Tel:(65)-7526311,Fax:(65)-75822872 Yishun Avenue 7,Singapore 768924.Tel:(65)-7526311,Fax:(65)-7582287 Soaring to New HeightsSoaring to New HeightsSoaring to New HeightsSoaring to New Heights4 4Die 1Die 2Bond Ball2nd Bond(wedge)1st Bond Figure 1:Bond Stick On Ball(BSOB)ASMASMASMTechnol

7、ogy SingaporeTechnology Singapore2 Yishun Avenue 7,Singapore 768924.Tel:(65)-7526311,Fax:(65)-75822872 Yishun Avenue 7,Singapore 768924.Tel:(65)-7526311,Fax:(65)-7582287 Soaring to New HeightsSoaring to New HeightsSoaring to New HeightsSoaring to New Heights5 52.0)BOND BALL ON STITCH(BBOS)/SECURITY

8、BOND2.1)DescriptionThis process is also known as security bond.It bonds a ball on top of the wedge of the normal connection wire.This process is mainly used to secure the second bond sticking capability.(Figure 2)Die 1LeadBond Ball2nd Bond(wedge)1st Bond Figure 2:Bond Ball On Stitch(BBOS)ASMASMASMTe

9、chnology SingaporeTechnology Singapore2 Yishun Avenue 7,Singapore 768924.Tel:(65)-7526311,Fax:(65)-75822872 Yishun Avenue 7,Singapore 768924.Tel:(65)-7526311,Fax:(65)-7582287 Soaring to New HeightsSoaring to New HeightsSoaring to New HeightsSoaring to New Heights6 63.1)Free Air Ball(FAB 2)is aligned

10、 to the center of the bond pad on device 2.Device 1Device 2FAB 23.0 STANDOFF BALL CONTROL BONDING SEQUENCEASMASMASMTechnology SingaporeTechnology Singapore2 Yishun Avenue 7,Singapore 768924.Tel:(65)-7526311,Fax:(65)-75822872 Yishun Avenue 7,Singapore 768924.Tel:(65)-7526311,Fax:(65)-7582287 Soaring

11、to New HeightsSoaring to New HeightsSoaring to New HeightsSoaring to New Heights7 73.2)Capillary descends and bonds ball to bond pad.Device 1Device 2W/clamp openCapillaryApplication of 1st bond stand off ball parameter to form Ball Thickness and Ball SizeDuring Stand Off Bonding,SOB parameters are a

12、pplied.ASMASMASMTechnology SingaporeTechnology Singapore2 Yishun Avenue 7,Singapore 768924.Tel:(65)-7526311,Fax:(65)-75822872 Yishun Avenue 7,Singapore 768924.Tel:(65)-7526311,Fax:(65)-7582287 Soaring to New HeightsSoaring to New HeightsSoaring to New HeightsSoaring to New Heights8 83.3)Capillary ri

13、ses to loop base to clear ball.Device 1Device 2W/clamp openCapillary rises to set Loop BaseLoop BaseContact Pt.Loop base is the distance between the capillary tip and contact point.Recommended setting=2ASMASMASMTechnology SingaporeTechnology Singapore2 Yishun Avenue 7,Singapore 768924.Tel:(65)-75263

14、11,Fax:(65)-75822872 Yishun Avenue 7,Singapore 768924.Tel:(65)-7526311,Fax:(65)-7582287 Soaring to New HeightsSoaring to New HeightsSoaring to New HeightsSoaring to New Heights9 93.4)Capillary move to programme ball offset.Ball offset can be programmed towards or away from the first bond.+ve towards

15、 2nd bond -ve away 2nd bond Device 1Device 2W/clamp openActual Ball Offset=Setting x 10umIf Ball Offset Setting=22Then Actual Loop Base=220umRecommended Setting=-ve 35ASMASMASMTechnology SingaporeTechnology Singapore2 Yishun Avenue 7,Singapore 768924.Tel:(65)-7526311,Fax:(65)-75822872 Yishun Avenue

16、7,Singapore 768924.Tel:(65)-7526311,Fax:(65)-7582287 Soaring to New HeightsSoaring to New HeightsSoaring to New HeightsSoaring to New Heights10103.5)Capillary descends and forms stitch bond on top of the ball.Device 1Device 2W/clamp open*Ball ThicknessSOB Parameter (Stand Off Ball Parameter)Capillar

17、y descends to set Ball Thickness(Amt.Z movement above the ball height)Contact Pt.*Ball Thickness is the distance between the capillary tip and contact point Recommended setting=2 ASMASMASMTechnology SingaporeTechnology Singapore2 Yishun Avenue 7,Singapore 768924.Tel:(65)-7526311,Fax:(65)-75822872 Yi

18、shun Avenue 7,Singapore 768924.Tel:(65)-7526311,Fax:(65)-7582287 Soaring to New HeightsSoaring to New HeightsSoaring to New HeightsSoaring to New Heights11113.6)Capillary moves horizontally for a scrub distance to weaken the wire at ball neck.Device 1Device 2W/clamp openScrub one direction away from

19、 ballActual Scrub Distance=Setting x 0.8 umIf Scrub Distance Setting=10Then Actual Scrub Distance=8 um Capillary move to set Scrub Distance One direction ONLY-Away from the ball Recommended setting=8ASMASMASMTechnology SingaporeTechnology Singapore2 Yishun Avenue 7,Singapore 768924.Tel:(65)-7526311,

20、Fax:(65)-75822872 Yishun Avenue 7,Singapore 768924.Tel:(65)-7526311,Fax:(65)-7582287 Soaring to New HeightsSoaring to New HeightsSoaring to New HeightsSoaring to New Heights12123.7)Capillary rises to tail heightDevice 1Device 2W/clamp closeCapillary moves to set Tail Length(Amount Z movement above t

21、he bump before the wire clamp closes)Recommended setting=35ASMASMASMTechnology SingaporeTechnology Singapore2 Yishun Avenue 7,Singapore 768924.Tel:(65)-7526311,Fax:(65)-75822872 Yishun Avenue 7,Singapore 768924.Tel:(65)-7526311,Fax:(65)-7582287 Soaring to New HeightsSoaring to New HeightsSoaring to

22、New HeightsSoaring to New Heights13133.8)Capillary rises and tears the wire,as BH ascend to Fire Level.Device 1Device 2W/c closeASMASMASMTechnology SingaporeTechnology Singapore2 Yishun Avenue 7,Singapore 768924.Tel:(65)-7526311,Fax:(65)-75822872 Yishun Avenue 7,Singapore 768924.Tel:(65)-7526311,Fax

23、:(65)-7582287 Soaring to New HeightsSoaring to New HeightsSoaring to New HeightsSoaring to New Heights14143.9)EFO fires to form free air ball.Cycle repeats until all“Standoff Ball”are placed.Device 1Device 2Bond BallFABASMASMASMTechnology SingaporeTechnology Singapore2 Yishun Avenue 7,Singapore 7689

24、24.Tel:(65)-7526311,Fax:(65)-75822872 Yishun Avenue 7,Singapore 768924.Tel:(65)-7526311,Fax:(65)-7582287 Soaring to New HeightsSoaring to New HeightsSoaring to New HeightsSoaring to New Heights15153.10)After placing all standoff balls.The machine continue to bond wires.2nd Bond(wedge)1st Bond Device

25、1Device2Device1Bond BallASMASMASMTechnology SingaporeTechnology Singapore2 Yishun Avenue 7,Singapore 768924.Tel:(65)-7526311,Fax:(65)-75822872 Yishun Avenue 7,Singapore 768924.Tel:(65)-7526311,Fax:(65)-7582287 Soaring to New HeightsSoaring to New HeightsSoaring to New HeightsSoaring to New Heights16

26、16Bump ball formation for BSOB/BBOSMOTION BO LB BT SCNormalLBBOBTScrubFlatLBBOBTScrub=0CONELBBOBT=LBScrub=0 LB BO BT LB BOThe bump ball formation process is almost like bonding a normal wire,including 1st bond,looping and 2nd bond parameters.ASMASMASMTechnology SingaporeTechnology Singapore2 Yishun

27、Avenue 7,Singapore 768924.Tel:(65)-7526311,Fax:(65)-75822872 Yishun Avenue 7,Singapore 768924.Tel:(65)-7526311,Fax:(65)-7582287 Soaring to New HeightsSoaring to New HeightsSoaring to New HeightsSoaring to New Heights17174.0)PARAMETER DEFINITION IN STAND OFF BALL CONTROL MENU4.1)Loop BaseThis paramet

28、er determines the loop level of the bondhead which should be sufficient to avoid the ball.Range:Loop Base 0 5Setting:24.2)Ball OffsetThis setting controls the distance of the table move in order to offset the capillary from the standoff ball.Negative value can be moved towards to the first bond.Posi

29、tive value can be moved away from the first bond.Range:Ball Offset -40 20Setting:-ve 35 ASMASMASMTechnology SingaporeTechnology Singapore2 Yishun Avenue 7,Singapore 768924.Tel:(65)-7526311,Fax:(65)-75822872 Yishun Avenue 7,Singapore 768924.Tel:(65)-7526311,Fax:(65)-7582287 Soaring to New HeightsSoar

30、ing to New HeightsSoaring to New HeightsSoaring to New Heights18184.4)Scrub DistanceThis setting controls the capillary moves horizontally with a Scrub amplitude to weaken the wire at neck.It is always away from thefirst bond.Range:Scrub Dist 4 12Setting:84.5)Tail LengthThis setting controls the len

31、gth of the tail where the bondhead rises to the preset height before the wire clamp is closed.Range:Tail Length 30 40Setting:354.3)Ball ThicknessThis parameter refer to the ball thickness which controls the level of the bondhead as it descends to the top of the ballRange:Ball Thickness 0 5Setting:2A

32、SMASMASMTechnology SingaporeTechnology Singapore2 Yishun Avenue 7,Singapore 768924.Tel:(65)-7526311,Fax:(65)-75822872 Yishun Avenue 7,Singapore 768924.Tel:(65)-7526311,Fax:(65)-7582287 Soaring to New HeightsSoaring to New HeightsSoaring to New HeightsSoaring to New Heights19194.6)Time Base 1/2This s

33、etting controls the bond time applied to the standoff ball control only.Time 1 for the 1st bond and Time 2 for the 2nd bond.4.7)Power Base 1/2This setting controls the ultrasonic power applied to the standoff ball control only.Power 1 for the 1st bond and Time 2 for the 2nd bond.4.8)Force Base 1/2Th

34、is setting controls the bonding force applied to the standoff ball control only.Force 1 for the 1st bond and Force 2 for the 2nd bond.ASMASMASMTechnology SingaporeTechnology Singapore2 Yishun Avenue 7,Singapore 768924.Tel:(65)-7526311,Fax:(65)-75822872 Yishun Avenue 7,Singapore 768924.Tel:(65)-75263

35、11,Fax:(65)-7582287 Soaring to New HeightsSoaring to New HeightsSoaring to New HeightsSoaring to New Heights20204.9)Standby Power 1/2This setting controls the power activated when the bonding head reach the search level,to the moment the bond head contacts the bond surface.With the vibration,before

36、contact take place.Bond head will clean up the pad surface and remove water vapor on the pad.This parameter used for the standoff ball control only.4.10)Contact Time 1/2Refer to the Contact time 1/2 definition in Bond Parameter menu.But this parameter will be affected on the Standoff ball control on

37、ly.ASMASMASMTechnology SingaporeTechnology Singapore2 Yishun Avenue 7,Singapore 768924.Tel:(65)-7526311,Fax:(65)-75822872 Yishun Avenue 7,Singapore 768924.Tel:(65)-7526311,Fax:(65)-7582287 Soaring to New HeightsSoaring to New HeightsSoaring to New HeightsSoaring to New Heights21214.11)Contact Power

38、1/2Refer to the Contact Power 1/2 definition in Bond Parameter menu.But this parameter will be affected on the Standoff ball control only.4.12)Contact Force 1/2Refer to the Contact Force 1/2 definition in Bond Parameter menu.But this parameter will be affected on the Standoff ball control only.ASMAS

39、MASMTechnology SingaporeTechnology Singapore2 Yishun Avenue 7,Singapore 768924.Tel:(65)-7526311,Fax:(65)-75822872 Yishun Avenue 7,Singapore 768924.Tel:(65)-7526311,Fax:(65)-7582287 Soaring to New HeightsSoaring to New HeightsSoaring to New HeightsSoaring to New Heights2222Figure 4:Standoff Ball Cont

40、rol Parameter Display(page 2)5.0 BSOB WIRE PARAMETERSASMASMASMTechnology SingaporeTechnology Singapore2 Yishun Avenue 7,Singapore 768924.Tel:(65)-7526311,Fax:(65)-75822872 Yishun Avenue 7,Singapore 768924.Tel:(65)-7526311,Fax:(65)-7582287 Soaring to New HeightsSoaring to New HeightsSoaring to New He

41、ightsSoaring to New Heights23235.1)Wire Offset In-MenuThis is the offset parameter that is required to ensure maximum contact area between the stitch bond and ball.It is always away from the first bond.Range:Wire Offset 10 30 Recommended setting=255.2)Second Bond Search SpeedThis Parameter controls

42、the impact for stitch on ball.Range:Search Speed 2 32 256Recommended setting=322nd Bond WedgeStand Off BallCapillary position during stitch bondASMASMASMTechnology SingaporeTechnology Singapore2 Yishun Avenue 7,Singapore 768924.Tel:(65)-7526311,Fax:(65)-75822872 Yishun Avenue 7,Singapore 768924.Tel:

43、(65)-7526311,Fax:(65)-7582287 Soaring to New HeightsSoaring to New HeightsSoaring to New HeightsSoaring to New Heights24245.3)Time Base 1/2This setting controls the bond time applied to the device.Time 1 for the 1st bond and Time 2 for the 2nd bond.5.4)Power Base 1/2This setting controls the ultraso

44、nic power applied to the device.Power 1 for the 1st bond and Time 2 for the 2nd bond.5.5)Force Base 1/2This setting controls the bonding force applied to the device.Force 1 for the 1st bond and Force 2 for the 2nd bond.ASMASMASMTechnology SingaporeTechnology Singapore2 Yishun Avenue 7,Singapore 7689

45、24.Tel:(65)-7526311,Fax:(65)-75822872 Yishun Avenue 7,Singapore 768924.Tel:(65)-7526311,Fax:(65)-7582287 Soaring to New HeightsSoaring to New HeightsSoaring to New HeightsSoaring to New Heights2525Ball Parameters for BSOB and BBOS5.6 Tail LengthControls the length of the tail where the bond head ris

46、es to the preset height before the wire clamp is closedRange 15 45(*10um)ASMASMASMTechnology SingaporeTechnology Singapore2 Yishun Avenue 7,Singapore 768924.Tel:(65)-7526311,Fax:(65)-75822872 Yishun Avenue 7,Singapore 768924.Tel:(65)-7526311,Fax:(65)-7582287 Soaring to New HeightsSoaring to New Heig

47、htsSoaring to New HeightsSoaring to New Heights2626Ball Parameters for BSOB and BBOS5.7 Tail break TimeUsed to increase the wire straightness and reduce the snake wire during BSOB/BBOS applicationRange 0 -100(*0.25ms)Setting 10ASMASMASMTechnology SingaporeTechnology Singapore2 Yishun Avenue 7,Singap

48、ore 768924.Tel:(65)-7526311,Fax:(65)-75822872 Yishun Avenue 7,Singapore 768924.Tel:(65)-7526311,Fax:(65)-7582287 Soaring to New HeightsSoaring to New HeightsSoaring to New HeightsSoaring to New Heights2727Ball Parameters for BSOB and BBOS5.8 Tail Break DistanceUsed together with the tail break timeTraveling distance can be determined by the settingRange 10 50(*10um)Setting 25Tail break time and tail break distance are valid only when the wire or ball tail break map in wire parameter menu is set to“Y”.