CT扩散炉培训教材(设备中英文版).ppt

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1、centrotherm扩散炉设备培训 equipment training of centrotherm Diffusion furnace Centrotherm扩散炉的组成ALoading box 推舟部分B.TGA 有毒气体排放C.Heating furnace 加热部分D.Gas cabinet 气柜设备 平面结构Equipment plane structure 1、CMI电脑2、Loading box上料箱3、Toxic gases 有毒气体排放4、Furnace 炉体 5、Gas box 气源柜Loading box上料箱 Baddle head舟头Loading wafer加栽

2、的硅片Loading box上料箱 Mechanical arm 机械臂Loading box 上料箱 Storage rack 1，2 存储位1、2 Paddle bearing,adjustable paddle position 碳化硅桨支座，调节桨位置TGA有毒气体排放quartz door石英门Door cylinder炉门气缸Heating furnace炉膛1、CMS module 3、Power connection cover2、Thermocouple connection 4、Temperature sensor module Gas cabinet气源柜1、Flow m

3、eter 气体流量计2、Pneumatic valve 气动阀12Cooling water inlet and water system冷却水系统Cooling to the top of the furnace body and furnace 对炉膛顶部和炉体进行冷却Thermostatic bath恒温槽On the POCL3 constant temperature process,normal temperature 20 degrees对POCL3进行恒温作用，正常工艺温度20度Silicon carbide paddle碳化硅桨Bearing quartz and silic

4、on,and out of the carrier ship承载石英舟和硅片石英舟进出的载体Range detection alarm范围检测报警器Detection of a range of whether object,avoid hit boat phenomenon,this range can be adjusted检测某个范围内是否有物体，避免出现撞舟现象，些范围可进行调节 Communication Network Overview通信网络总览Heating system加热系统Cooling system冷却系统1、Heat exchanger2、Cooling3、Shuto

5、ff valve 1、Cooling 4、Heat exchanger2、The main fan 5、Electronic devices 3、Cooling the air passageAlarm lamp informationIndicator lampcoloractionmeaninggreenopenReady to operatetwinklepauseblueopenUser interaction requiredyellowopenwarningredShines hom:offAlarmerrorOperation panel操作面板1operation panel

6、4 keyboard2Touch screen 5 touch screen button 3USB socketOperation panel操作面板The equipment has the following button1Stop action-All the mechanical action of loading box are stop2Loading box lighting-openclose the lamp of the loading box3Autohand manual switch-Loading and unloading of the operating sy

7、stem can manual operation in an open feeding box4 Allows to unlock-Press this button,to unlock the carOperation panel操作面板1 pushbutton ABC keyboard call 4 pushbutton right mouse button2Pushbutton task change 5 pushbutton shift3Pushbutton brightnessABC keyboard call-calls upclosses the keyboard on the

8、 touchscreen,keyboard entries can be carried out directly on the touchsceen.Pushbutton task change-changes a task windowsPushbutton brightness-press this button together with the shife button to increase the brightness of the touchscress.Pushbutton right mouse buttonopens right mouse button context

9、menu,press this button together with the shift button to reduce the touchscreen.Pushbutton shiftcalls up the second keyboard level,push this bushbutton together with the required function button.CMI interface CMI桌面信息1System name 7 alarm close 2Date time 8 notes3Centrotherm logo and system 9 addition

10、al information Information button4Current display area in the 10 system mode Information field 11 connection state with CECGEM5System status6Loginlogout buttonCMI interface CMI桌面信息1Jobs 4 setup2System 5 alarms3Datslog 6 help(online help)The CMI user interfaceCMI使用者桌面1Title bar 3 navigation bar2Comma

11、nd bar 4 information field with variable field areas 简单介绍CESAR界面A brief introduction to CESAR interface上图是CESAR的界面：1.系统工艺状态 2.工艺时间状态 3.时间日期 4.气体流量状态 5.系统准备状态 6.温度检测显示This is a CESAR interface：1.System process 2.Process time 3.Time and date 4.Gas flow state 5.System readiness 6.Temperature detection

12、and displayCT操作注意事项CT operation matters needing attention1.SLS1.SLS处处于于“UPUP”位置位置时时，管，管内内有舟有舟时时不可手不可手动进桨动进桨 SLS in the UP position,the inner tube has a boat can not be manually into the paddle.2.SLS2.SLS处处于于“DOWNDOWN”位置位置时时，桨桨上有舟上有舟时时不得手不得手动进动进舟。舟。SLS in the DOWN position,the paddle is not manually

13、into the boat boat.3.3.桨桨上有舟上有舟时时，舟不在正确位置，不准切，舟不在正确位置，不准切换换到自到自动动运运行行模式。模式。Oars on a boat,the boat is not in the correct position,are not allowed to switch to automatic running mode.CT操作注意事项CT operation matters needing attention4.4.进进舟、退舟失舟、退舟失败报败报警警时时，一定要，一定要检查检查舟的位置舟的位置 是否在合理的位置，才可以是否在合理的位置，才可以对报对

14、报警警进进行行复复位，自位，自动动/手手动动的切的切换换要要谨谨慎慎，若舟不在正确位置，若舟不在正确位置，请请手手动动移至正确位置后再移至正确位置后再对报对报警警进进行行复复位（位（炉炉门门以以桨桨的位置作的位置作为为开开闭标闭标准）准）Into the boat,boat back failure alarm,be sure to check the boat position is in a reasonable position,can alarm reset,automatic/manual switch must be careful,if the ship is not in th

15、e correct position,please manually moved to the correct position after the alarm reset(door to paddle position as opening and closing standard)5.舟位于存储架（storage2,3）时，一定要确认存储架上 的感应器有没有感应到，否则有可能导致撞舟。When the boat is located on the storage rack(storage2,3),make sure that the storage rack sensor is sense

16、d,otherwise may cause the bumped boat.6.从手动切换自动时，Grip一定要在Middle位置，否则机械臂可能因无法正常运行而报警。From manual automatic,Grip must be in the Middle position,or mechanical arm may be due to normal operation and alarm.7.进舟后，工艺无法运行，先确认舟在桨上的位置，以及Tube=readySLS=UPTGA=YES然后进行操作。In the boat,technology cannot run,make sure

17、 the boat on the oar position,as well as Tube=ready SLS=UP TGA=YES then operation.8.机械臂运动时不要上料，以免上料时抖动机械臂撞到舟。As mechanical arm movement not feeding,in order to avoid feeding time jitter mechanical arm hit the boat。9.单一炉管有故障时，应该及时琐闭并降温，以节约能源。Single tube has fault,should be timely and closed and cooli

18、ng,in order to save energy.常见故障1.ProcessrecipehasterminatedwitherrorstateAC进行中的工艺以错误状态结束警报确认Tostore储存Tostoreenableunload储存并缷下Restartrecipe重新开始工艺A用于选错工艺号，手动结束工艺，重新开始新的其他工艺时进行选择B多数情况下选择此项C工艺中断需要重新进行时选择，但不建议使用，建议选择（B）ProcessrecipehasterminatedwitherrorstateACOngoingprocesstoendtheerrorstatusAlarmconfir

19、mationTostoreTostoreenableunloadRestartrecipe AUsedthewrongprocessnumber，Handendoftheprocess，Startanewchoicewhenotherprocesses BInmostcases,choicethisone CInterruptsneedtore-processtheselection,butnotrecommended,recommendedtochoose(B)。2.Boatalreadyintube-Select:Process=0.Unload=1(.)选择0或1说明：当管内有舟存在时，

20、异常排除后手动运行工艺时会出现此提示Boatalreadyintube-Select:Process=0.Unload=1(.)Description:Whenthetubehasaboatthere,theexceptionruleoutrunningprocessmanuallyafterthispromptwillappear.3.Losthomingcheckpoti失去引导，检查位置（一般此警报会自动解除）说明：此警报会自动解除，但需要检查一下桨是否在原点位置即可LosthomingcheckpotiCheckthelocation(usuallythealarmwillbeauto

21、maticallylifted)Description:Thisalarmwillbeautomaticallylifted,butneedCheckwhethertheoriginlocationtopaddle4.Recipeabort2-processaborttocontinue:enterAB 工艺退出运行终止！继续，请输入AB 说明：对工艺异常结束的手动确认，然后就会出现报警 Recipeabort2-processaborttocontinue:enterABDescription:Themanualconfirmationprocessends,5.Recipe couldnt

22、 be started please check protocol for reason!工艺不能运行，请检查原因 Recipecouldntbestartedpleasecheckprotocolforreason!.6.Boat sensor of grad has changed without permission 机械手上的传感器被非允许的改动 说明：机械臂在上下移动的时候，前后不能移动，若前后位置发生移动机械将被锁定，出现报警，此报警需设备人员的密码登陆在Handing 对话框中的Tech模式下进行复位Boatsensorofgradhaschangedwithoutpermiss

23、ionDescription:Theroboticarmtomoveupanddownwhenyoucannotmovearound,ifthelocationismovedaroundthemachinewillbelocked,analarm,thealarmequipment,personnelneedtologinapassworddialogboxintheTechHandingresetmode 7.There is already an active recipe 工艺名 from local tisting 已有工艺在此管的工艺列表中 说明：这两个报警经常出现，若能够确认此管未

24、有 工艺在运行，就必须将此管重新启动，如果有工艺运行，可以将工艺手动停止，或者等待工艺结束。ThereisalreadyanactiverecipefromlocaltistingDescription:Thistwoalarmsarefrequent,ifnotabletoconfirmthisprocessintherunpipe,thispipemustberestarted,ifprocessisrunning,youcanstoptheprocessmanually,orwaitfortheprocessends.8.Tube ready in undefined.Please en

25、sure that the cesar loading machine is at“0”position and softlander is“up”管子的状态无法被确认，请确保CESAR接收到桨在“0”和“up”的位置。9.Boat collision 舟被撞击10.The boatsensor has detected no boat in the grap although a boat should be in the grap.Please check boat in grap sensor and try again.虽有一个舟在机械手上，但传感器感应不到，检查舟是否接触到传感器后再试一次。11.Water flow flange TGA(gas side)st1.冷却炉报警12.Grab sensor undefined No movement possible!Check boat position.传感器不明确，无法移动，检查舟的位置。13.Boat position(speed)out of 1ST(2ND)tolerance 舟的位置（速度）超过第一个（第二个）限值