基于多功率源梯度过渡层的Si-DLC的制备及水润滑性能研究.docx
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1、基于多功率源梯度过渡层的Si-DLC的制备及水润滑性能研究Si-DLC films with gradient transition layer based on multi-power sources were prepared by plasma enhanced chemical vapor deposition (PECVD), and their water lubrication properties were investigated. The influence of deposition power on the microstructure, mechanical prop
2、erties and surface wettability of the Si-DLC films was studied in detail. The results showed that the optimized Si-DLC film exhibited excellent water lubricity, with a friction coefficient of 0.005 and wear rate of 1.710 mm/Nm under water lubrication conditions.IntroductionDiamond-like carbon (DLC)
3、films have attracted great attention in recent years due to their excellent mechanical properties, high hardness, low friction coefficient and wear resistance, making them suitable for various industrial applications. The addition of silicon (Si) in DLC films can further enhance its properties, such
4、 as thermal stability, adhesion and electrical conductivity. However, the poor wettability and adhesion of Si-DLC films on many substrates limit their practical applications. To improve the tribological behavior of Si-DLC films and their adhesion to substrates, the introduction of gradient transitio
5、n layer between the film and substrate has been proposed. Moreover, water lubrication has been widely used in many industrial applications due to its low cost, eco-friendliness and safety. Therefore, it is necessary to investigate the water lubrication properties of Si-DLC films with gradient transi
6、tion layer.ExperimentalSi-DLC films were deposited on Si (100) wafers and AISI 52100 steel substrates by PECVD using a gas mixture of CH and SiH, with different deposition powers. The deposition power was varied from 50 to 300 W, and a multi-power sources were used to deposit the gradient transition
7、 layer. The microstructure, mechanical properties and surface wettability of the films were characterized by scanning electron microscopy (SEM), Raman spectroscopy, nanoindentation test and contact angle measurement. The tribological properties of the films were evaluated using a ball-on-disc tribom
8、eter under both dry and water lubrication conditions.Results and discussionThe SEM images showed that the Si-DLC films deposited at 150 W had a dense and smooth surface, while those deposited at lower or higher powers had a non-uniform surface with more pores and roughness. The Raman spectra indicat
9、ed that the Si content increased with the deposition power. The Si-DLC film deposited at 150 W exhibited the highest hardness and Youngs modulus, as well as the lowest friction coefficient and wear rate under both dry and water lubrication conditions. The contact angle measurement showed that the Si
10、-DLC films had good wettability, and their surface hydrophilicity increased with the deposition power. The water lubricity of Si-DLC films was significantly improved compared with dry friction, and the Si-DLC film deposited at 150 W had the lowest friction coefficient and wear rate. The water adsorp
11、tion and lubrication mechanism of Si-DLC films were also discussed.ConclusionsSi-DLC films with gradient transition layer were successfully prepared by PECVD using multi-power sources, and their water lubrication properties were investigated. The deposition power significantly affected the microstru
12、cture, mechanical properties and surface wettability of the Si-DLC films. The Si-DLC film deposited at 150 W exhibited the best friction and wear properties under both dry and water lubrication conditions, indicating excellent water lubricity. The study provides a new way to improve the water lubric
13、ity of Si-DLC films and their practical applications in tribological systems.Further investigations can be carried out to explore the effects of other deposition parameters, such as gas flow rate and pressure, on the water lubricity of Si-DLC films. Moreover, the long-term durability of Si-DLC films
14、 under water lubrication conditions needs to be evaluated. In addition, the potential applications of Si-DLC films in biomedical and electronic devices can also be explored. Overall, the results of this study demonstrate the feasibility of producing Si-DLC films with gradient transition layer for im
15、proving water lubricity, and pave the way for the practical applications of such coatings in various tribological systems.In addition to investigating the effects of deposition parameters and long-term durability, further research can be conducted to understand the underlying mechanisms of the impro
16、ved water lubricity of Si-DLC films with gradient transition layer. Specifically, the interfacial properties and chemical bonding between the films and water molecules can be studied using advanced surface analysis techniques, such as X-ray photoelectron spectroscopy and atomic force microscopy.Furt
17、hermore, the optimization of the design and thickness of the gradient transition layer can also be explored to further enhance the water lubricity of Si-DLC films. This can be achieved through a systematic investigation of the relationship between the thickness and composition of the transition laye
18、r and the resulting tribological properties.Lastly, the practical application of Si-DLC films with gradient transition layer can be explored in various industrial sectors, such as aerospace, automotive, and biomedical industries. Specifically, the films can be applied to engine components, bearings,
19、 and medical implants to reduce friction and wear, improve energy efficiency, and minimize the risk of failure and replacement.Overall, further research on Si-DLC films with gradient transition layer can promote the development of advanced and sustainable tribological solutions, contributing to the
20、advancement of modern industrial and biomedical technologies.Another area of research that can be explored is the effect of varying the substrate material on the tribological properties of Si-DLC films with gradient transition layer. The choice of substrate material can have an impact on the adhesio
21、n of the films, as well as their mechanical and chemical properties. Therefore, investigating the effects of different substrate materials on the performance of Si-DLC films with gradient transition layer can provide valuable insights into the optimization of their design and application.Additionall
22、y, the integration of Si-DLC films with other surface modifications, such as surface texturing and nanostructuring, can also be investigated. Synergistic effects of combining multiple surface modification techniques could lead to further improvements in the tribological properties of the films, such
23、 as enhanced load carrying capacity, reduced wear, and increased fatigue life. Moreover, the biocompatibility and cytotoxicity of Si-DLC films with gradient transition layer can be studied to determine their suitability for medical applications, such as implant coatings. These characteristics are cr
24、ucial for ensuring the films do not cause any adverse reactions or negatively impact cellular function. In summary, Si-DLC films with gradient transition layer offer promising tribological performance and have the potential for multiple industrial and biomedical applications. Further investigations
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