中科院 微电子机械系统设计(MEMS)课件3657.pptx

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1、 Introduction to MEMS Spring 2012Weidong YiDesign,Analysis,FabricationCourse OverviewnPart 1 Introduction to MEMS nPart 2 Microfabrication FundamentalsnPart 3 Microsystem Fabrication Processes nPart 4 Mechanics,and TransductionnPart 5 Electronic Interface Design PrinciplesnPart 6 MEMS Design Case St

2、udiesnTextsbook:n1.Stephen D.Senturia,Microsystem Design,Kluwer Academic Press,2001n2.Course Reader(Selected Reference Papers)Part 1Introduction to MEMSWhat are the Goals of this Course?nAccessible to a broad audience minimal prerequisitesnDesign emphasis exposure to the techniques useful in analyti

3、cal design of structures,transducers,and process flowsnPerspective on MEMS research and commercialization circaCourse MechanicsnLectures:Monday,Wednesday 10:00-12:00 nHomework:bi-weekly assignments distributed on Thursdays and due the following Thursday at the class beginningnExam:(TBA)nOffice Hours

4、:(TBA)nCredit breakdown(approximate)10%homework 30%final Project 60%final examLecture Outlinen Todays LecturenWhat is MEMS nHistorical tour of MEMSnMEMS and nanotechnologynMicro ElectroMechanical SystemsMEMS DefinedWhat is MEMSnMEMS involve both electronic and non-electronic elementsnthermal,magneti

5、c,fluidic and optical devicesnMEMS are“systems”in the true sensenPackaging,system partitioning into components,calibration,signal-to-noise ration,stability,reliabilitynMEMS may involve large arrays of microfabricated elementsnDNA array,infrared imaging devices,both reflective and refractive projecti

6、on displaysExamples of MEMS Devices ninkjet-printer cartridges naccelerometersnMicroenginesn inertial sensors n micromirrors,n optical scannersn fluid pumps,chemical,pressure and flow sensors.nBiosensorsDimensional Rangesn1 mm L 300 mm lateral dimensionsSurface micromachined structures “classic MEMS

7、”n300 mm L 3 mmBulk silicon/wafer bonded structures still call them MEMS and cover them in this coursen10 nm L 2015 Non-volatile memories CommunicationsMEMS Market and Industry StudiesMEMS Market and Industry StudiesnMicro-electro-mechanical systems(MEMS)are one of the fastest growing technology are

8、as,with sales of around$5 billion.They are expected to grow at an average annual rate of more than 20%over the rest of the decade.nThe growth in the use of MEMS has also led to the creation of supporting industries in areas such as nMEMS design software,nDesign services,nSpecialty fabrication equipm

9、entnFabrication facilities.MEMS Market and Industry StudiesMEMS市场要点市场要点 nMEMS仍然是一个分散的市场：鲜有MEMS应用市场规模超过2亿美元。nMEMS现在提供至关重要的增值功能。n新型MEMS应用商业化的时间更短。n消费电子市场需要8英寸晶圆制造线。n需要简化制造流程：n MEMS定律：“一种产品，一种工艺，一种封装”，nMEMS封装显然是增加成本的重要环节。MEMS公司公司 MEMS代工 FutureFuturen物联网是中国未来发展的经济引擎，发展物联网将对中国未来国际政治经济地位产生重大影响。而“传感”做为物联网中的核心环节之一，将催生中国的MEMS产业蓬勃发展。MEMS Market and Industry Studies谢谢观看/欢迎下载BY FAITH I MEAN A VISION OF GOOD ONE CHERISHES AND THE ENTHUSIASM THAT PUSHES ONE TO SEEK ITS FULFILLMENT REGARDLESS OF OBSTACLES.BY FAITH I BY FAITH